公开(公告)号：US09243326B2

公开(公告)日：2016-01-26

申请号：US13636874

申请日：2011-03-17

申请人： Yu Yan Jiang ,  Masahide Inagaki ,  Kenji Nakashima ,  Soichiro Makino ,  Nariaki Horinouchi ,  Takahiro Ito

发明人： Yu Yan Jiang ,  Masahide Inagaki ,  Kenji Nakashima ,  Soichiro Makino ,  Nariaki Horinouchi ,  Takahiro Ito

IPC分类号： C23C16/455

CPC分类号： C23C16/45508 ,  C23C16/45504 ,  C23C16/45587 ,  C23C16/45597

摘要： A surface treatment apparatus in which a disk-like sample-holding plate is provided inside an enclosure constituting a cylindrical circumferential wall. A cylindrical portion in an upper portion of the enclosure constitutes a material fluid supplying channel, and a channel provided on the lateral side of the sample-holding plate in the enclosure and shaped spreading as it goes farther from the cylindrical portion constitutes a fluid discharge channel. The fluid discharge channel employs a parabola curve or the like in which the position of the upper end of the outmost circumference of the sample-holding plate is defined as a focus position and the position of the upper end of the outlet that is symmetrically opposite to the focus position is defined as a reference position.

摘要翻译： 一种表面处理装置，其中盘形样品保持板设置在构成圆柱形周壁的外壳的内部。 外壳的上部的圆筒部分构成材料流体供给通道，并且设置在外壳中的样品保持板的侧面上的通道，并且随着与圆柱形部分更远的形状扩散，构成流体排出通道 。 流体排出通道使用抛物线曲线等，其中将样品保持板的最外周的上端的位置定义为聚焦位置，并且出口的上端的位置对称地相对于 焦点位置被定义为参考位置。

公开(公告)号：US20130008610A1

公开(公告)日：2013-01-10

申请号：US13636874

申请日：2011-03-17

申请人： Yu Yan Jiang ,  Masahide Inagaki ,  Kenji Nakashima ,  Soichiro Makino ,  Nariaki Horinouchi ,  Takahiro Ito

发明人： Yu Yan Jiang ,  Masahide Inagaki ,  Kenji Nakashima ,  Soichiro Makino ,  Nariaki Horinouchi ,  Takahiro Ito

IPC分类号： B05C13/02 ,  C23C16/458

CPC分类号： C23C16/45508 ,  C23C16/45504 ,  C23C16/45587 ,  C23C16/45597

摘要： A surface treatment apparatus in which a disk-like sample-holding plate is provided inside an enclosure constituting a cylindrical circumferential wall. A cylindrical portion in an upper portion of the enclosure constitutes a material fluid supplying channel, and a channel provided on the lateral side of the sample-holding plate in the enclosure and shaped spreading as it goes farther from the cylindrical portion constitutes a fluid discharge channel. The fluid discharge channel employs a parabola curve or the like in which the position of the upper end of the outmost circumference of the sample-holding plate is defined as a focus position and the position of the upper end of the outlet that is symmetrically opposite to the focus position is defined as a reference position.

摘要翻译： 一种表面处理装置，其中盘形样品保持板设置在构成圆柱形周壁的外壳的内部。 外壳的上部的圆筒部分构成材料流体供给通道，并且设置在外壳中的样品保持板的侧面上的通道，并且随着与圆柱形部分更远的形状扩散，构成流体排出通道 。 流体排出通道使用抛物线曲线等，其中将样品保持板的最外周的上端的位置定义为聚焦位置，并且出口的上端的位置对称地相对于 焦点位置被定义为参考位置。