公开(公告)号：US09070400B2

公开(公告)日：2015-06-30

申请号：US12821104

申请日：2010-06-22

申请人： Yuichi Hashizume ,  Kunio Hibino

发明人： Yuichi Hashizume ,  Kunio Hibino

IPC分类号： G11B5/855

CPC分类号： G11B5/855

摘要： A method of manufacturing a magnetic recording medium includes providing a substrate that is a magnetic recording medium substrate having a disc shape, having two main surfaces, and having defined therein a center hole; holding the center hole of the substrate from both main surfaces with two holding members that each have a disc shape to hold the substrate and to cover at least the periphery of the center hole adjacent to the two main surfaces of the substrate; and applying resist liquid simultaneously to both main surfaces of the substrate using spin coating to form a resist layer simultaneously on both main surfaces while maintaining the periphery of the center hole immediately adjacent to the two main surfaces of the substrate resist-free as an unapplied portion. The method enables efficient formation of uniform resist layers without defects on both faces of the substrate.

摘要翻译： 制造磁记录介质的方法包括：提供作为具有盘形状的磁记录介质基板的基板，具有两个主表面，并且在其中限定有中心孔; 从两个主表面保持基板的中心孔，其中两个保持构件具有保持基板的盘形状并至少覆盖与基板的两个主表面相邻的中心孔的周边; 并使用旋转涂布同时对基板的两个主表面施加抗蚀剂液体，同时在两个主表面上形成抗蚀剂层，同时保持与基板的两个主表面紧邻的中心孔的周边无抗蚀剂作为未施加部分 。 该方法能够有效地形成均匀的抗蚀剂层，而在衬底的两个表面上没有缺陷。