公开(公告)号：US06713564B1

公开(公告)日：2004-03-30

申请号：US10070267

申请日：2002-02-26

申请人： Yukikazu Nobuhara ,  Hitoshi Matsumoto ,  Nakamura Mitsuhiro ,  Asami Kobayashi

发明人： Yukikazu Nobuhara ,  Hitoshi Matsumoto ,  Nakamura Mitsuhiro ,  Asami Kobayashi

IPC分类号： C08F29702

CPC分类号： C08G81/021 ,  C08F297/02 ,  C08F297/023

摘要： A novel star block copolymer which can be made to have a high molecular weight and gives a solution having a lower viscosity than solutions of linear polymers having the same molecular weight as the copolymer and which is expected to be used as a resist material; and a process for producing the copolymer. The star block copolymer having alkenylphenol skeletons is obtained by homopolymerizing by living anion polymerization an alkenylphenol compound in which the hydroxyl group of the phenol moiety has been protected by a saturated aliphatic protective group or copolymerizing the alkenylphenol compound with a vinylaromatic compound by living anion polymerization, subsequently copolymerizing the resultant polymer using a polyfunctional coupling agent such as divinylbenzene to obtain a star block copolymer, and eliminating the saturated aliphatic protective groups with an acid reagent.

摘要翻译： 一种新型的星形嵌段共聚物，其可以制备成具有高分子量并且产生具有比具有与共聚物相同的分子量的线性聚合物的溶液的粘度较低的溶液并且预期用作抗蚀剂材料的溶液; 和共聚物的制造方法。 具有烯基苯酚骨架的星形嵌段共聚物通过活性阴离子聚合均聚而得到，其中苯酚部分的羟基被饱和脂族保护基保护或烯基酚化合物与乙烯基芳族化合物通过活性阴离子聚合共聚合的烯基酚化合物， 随后使用二官能偶合剂如二乙烯基苯共聚得到的聚合物，得到星形嵌段共聚物，并用酸试剂除去饱和脂族保护基。