公开(公告)号：US20110053461A1

公开(公告)日：2011-03-03

申请号：US12811934

申请日：2008-12-15

申请人： Yukinori Masuda ,  Toshinobu Yatsui

发明人： Yukinori Masuda ,  Toshinobu Yatsui

IPC分类号： B24B1/00 ,  B24B7/00

CPC分类号： B24B13/015 ,  B24B1/04 ,  B24B7/26 ,  B24B37/08

摘要： A plate material, while being transferred by a transfer mechanism, is sandwiched by two polishing heads. The plate material is transferred by the transfer mechanism while the two polishing heads are vibrated by a vibration mechanism in a direction crossing a transfer direction T of the plate material.

摘要翻译： 通过转印机构转印的板材由两个抛光头夹持。 当两个抛光头在与板材的传送方向T交叉的方向上通过振动机构振动时，板材由传送机构传送。