公开(公告)号：US06236163B1

公开(公告)日：2001-05-22

申请号：US09420615

申请日：1999-10-18

申请人： Yuri Maishev ,  James Ritter ,  Yuri Terentiev ,  Leonid Velikov ,  Alexander Shkolnik

发明人： Yuri Maishev ,  James Ritter ,  Yuri Terentiev ,  Leonid Velikov ,  Alexander Shkolnik

IPC分类号： H01J724

CPC分类号： H01J27/143 ,  H01J37/08 ,  H01J2237/0825

摘要： A multiple-beam ion-beam assembly consisting of two or more concentrically arranged ring-shaped ion-beam sources having ion-beam slits that emit a plurality of ion beams which overlap on the surface being treated and thus ensure uniformity in distribution of ion currents on the treated surface. Since the ion-beam assembly consists of a plurality of individual source, uniform treatment can be performed on a large surface area. Several embodiments of the invention cover the systems with individual sources adjustable with respect to one another, with an oblique angle of incidence of beams emitted from individual source, and with combination of oblique angles and adjustable sources.

摘要翻译： 由具有离子束狭缝的两个或更多个同心布置的环形离子束源组成的多光束离子束组件，其发射在被处理的表面上重叠的多个离子束，从而确保离子电流的分布均匀 在被处理的表面上。 由于离子束组件由多个单独的源组成，所以可以在大的表面积上进行均匀的处理。 本发明的几个实施例覆盖具有相对于彼此可调节的各个源的系统，具有从各个源发射的光束的倾斜入射角以及倾斜角度和可调节源的组合。

公开(公告)号：US6130507A

公开(公告)日：2000-10-10

申请号：US161581

申请日：1998-09-28

申请人： Yuri Maishev ,  James Ritter ,  Yuri Terentiev ,  Leonid Velikov

发明人： Yuri Maishev ,  James Ritter ,  Yuri Terentiev ,  Leonid Velikov

IPC分类号： H01J27/08 ,  H01J27/14 ,  H01J27/02

CPC分类号： H01J27/143

摘要： The ion source of the invention emits ion beams radially inwardly or radially outwardly from the entire periphery of the closed-loop ion-emitting slit. In one embodiment, a tubular or oval-shaped hollow body, which also functions as a cathode, contains a similarly-shaped concentric anode spaced from the inner walls of the cathode at a distance required to form an ion-generating and accelerating space. The cathode has a continuous ion-emitting slit which is aligned with the position of the anode and is concentric thereto. A magnetic-field generation means is located inside the ring-shaped anode. When the ion source is energized by inducing an magnetic field, connecting the anode to a positive pole of the electric power supply unit, the cathode to a negative pole of the power supply unit, and supplying a working medium into the hollow housing, the electrons begin to drift in the annular space between the anode and cathode in the same direction in which the ions are emitted from the annular slit. By rearranging positions of magnet, anode, and cathode, it is possible to provide emission of ions in the inward or outward direction for treating outer or inner surfaces of tubular objects.

摘要翻译： 本发明的离子源从闭环离子发射狭缝的整个周边径向向内或径向向外发射离子束。 在一个实施例中，也用作阴极的管状或椭圆形中空体包含与形成离子产生和加速空间所需的距离处于阴极内壁间隔开的类似形状的同心阳极。 阴极具有连续的离子发射狭缝，其与阳极的位置对准并与其同心。 磁场产生装置位于环形阳极内部。 当通过诱发磁场激励离子源时，将阳极连接到电源单元的正极，将阴极连接到电源单元的负极，并将工作介质供应到中空壳体中，电子 开始在阳极和阴极之间的环形空间中沿着从环形狭缝发射离子的相同方向漂移。 通过重新排列磁体，阳极和阴极的位置，可以在向内或向外的方向上提供离子的发射，用于处理管状物体的外表面或内表面。