公开(公告)号：US12121943B2

公开(公告)日：2024-10-22

申请号：US17913129

申请日：2022-05-09

申请人： ZHICHENG SEMICONDUCTOR EQUIPMENT TECHNOLOGY (KUNSHAN) CO., LTD.

发明人： Bin Hua ,  Xunbing Zhou ,  Bangyong Wan ,  Wenxuan Li

IPC分类号： B08B9/032 ,  B08B9/023 ,  F26B21/00

CPC分类号： B08B9/0325 ,  B08B9/023 ,  F26B21/004 ,  B08B2209/032

摘要： A cleaning apparatus for a quartz tube includes a cleaning cover with an opening in a bottom, a base vertically assembled with the cleaning cover through movable inserting, a bearing table arranged in the base and holding the quartz tube, and a driving apparatus; a top of the cleaning cover has a first nozzle; a side wall of the cleaning cover vertically has multiple second nozzles; the bearing table vertically has an inner spray tube; a top and a side of the inner spray tube above the bearing table have multiple third nozzles; a rotary sealing apparatus is embedded in the base; the inner spray tube continuously and vertically penetrates through the bearing table and the rotary sealing apparatus; the driving apparatus drives the bearing table to rotate; the inner spray tube remains stationary during rotation of the bearing table.