公开(公告)号：US10260863B2

公开(公告)日：2019-04-16

申请号：US15307581

申请日：2015-04-29

Applicant: attocube systems AG

Inventor： Martin Zech ,  Klaus Thurner

IPC: G01B11/02 ,  G01B11/14 ,  G01B9/02 ,  G03F7/20

Abstract: Interferometer (10) for the real-time measurement of absolute distances and/or relative position movements between a first and a second machine part, comprising a measurement unit (20) and a reflector unit (40). wherein the measurement unit (20) comprises a housing (21) with at least one wall made of heat-conducting material, wherein several measurement elements are arranged in the housing (21), wherein the measurement elements comprise: a laser source (22), a Peltier element (24) and a digital control (23) wherein the measurement elements are thermally coupled to the wall of the housing (21) made of heat-conducting material.