公开(公告)号：US09645029B2

公开(公告)日：2017-05-09

申请号：US14246244

申请日：2014-04-07

Applicant: lnfineon Technologies AG

Inventor： Dirk Hammerschmidt

IPC: G01L9/00 ,  B81B3/00 ,  G01L1/14 ,  G01L1/08

CPC classification number: G01L9/0072 ,  B81B3/0059 ,  G01L1/086 ,  G01L1/144

Abstract: A pressure sensor system comprises a force feedback loop. The force feedback loop is configured to receive a measured pressure sensor signal and generate a feedback signal based on the measured pressure and an electrostatic force. The electrostatic force is generated based on the feedback signal and combined with the measured force keeping the resultant sensor signal stable.