公开(公告)号：US20150284245A1

公开(公告)日：2015-10-08

申请号：US14267864

申请日：2014-05-01

Applicant: mCube Inc.

Inventor： RAYMOND MERRILL, JR. ,  DAVE PAUL JENSEN ,  YUAN-CHUN LIU

IPC: B81C99/00

CPC classification number: B81C99/004 ,  B81C99/0035 ,  B81C99/005

Abstract: A centrifuge screening system and method of testing MEMS devices using the system. The wafer level centrifuge screening system can include a base centrifuge system and a cassette mounting hub coupled to the base centrifuge system. The method can include applying a smooth and continuous acceleration profile to one or more MEMS components via the base centrifuge system. Each of the one or more MEMS components can have one or more MEMS devices formed thereon. The one or more MEMS components can be provided in one or more cassettes configured on the cassette mounting hub. The method can also include identifying one or more target MEMS components, which can include identifying stiction in one or more MEMS devices on the one or more MEMS components.

Abstract translation: 使用该系统的离心机筛选系统和测试MEMS装置的方法。 晶片级离心机筛选系统可以包括底座离心机系统和联接到基础离心机系统的盒安装毂。 该方法可以包括通过基本离心机系统向一个或多个MEMS组件施加平滑且连续的加速度曲线。 所述一个或多个MEMS组件中的每一个可以具有形成在其上的一个或多个MEMS器件。 一个或多个MEMS组件可以设置在配置在盒安装毂上的一个或多个盒中。 该方法还可以包括识别一个或多个目标MEMS组件，其可以包括识别一个或多个MEMS组件上的一个或多个MEMS装置中的静摩擦。