MEMS OPTICAL CIRCUIT SWITCH
    3.
    发明申请

    公开(公告)号:US20240409393A1

    公开(公告)日:2024-12-12

    申请号:US18741620

    申请日:2024-06-12

    Abstract: MEMS optical circuit switches (OCS) are provided herein, which include novel structures and methods for (1) Alignment of the optical components (collimator array, micro-electromechanical systems (MEMS) mirror array, etc.) in a three-dimensional (3D) MEMS optical circuit switch OCS at the time of assembly or calibration; (2) Detection of the mechanical rotation angle of each MEMS mirror in a 3D MEMS OCS using strain sensors; (3) Monitoring and compensation of the long-term MEMS mirror rotation angle drift and system alignment drift of a 3D MEMS OCS; and (4) Fabrication and assembly of a 2-directional MEMS mirror with piezoelectric actuators.

    SILICON PHOTONICS CHIP WITH PLC FOR EVANESCENT COUPLING

    公开(公告)号:US20250035853A1

    公开(公告)日:2025-01-30

    申请号:US18786097

    申请日:2024-07-26

    Abstract: Photonic integrated circuits (PICs) are provided that include silicon photonic structures such as a network of horizontal and vertical bus waveguides and micro-electro-mechanical-system (MEMS) actuated switching elements configured to selectively couple light between selected horizontal and vertical bus waveguides. The PICs of the present disclosure can be applied or used in a wide variety of fields including but not limited to fiber-optic communication, photonic computing, and light detection and ranging (LiDAR). The PICs can include one or more planar lightwave circuit (PLC) die configured to evanescently couple one or more optical fibers to the plurality of silicon photonics structures.

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