公开(公告)号：US07741852B2

公开(公告)日：2010-06-22

申请号：US11920085

申请日：2006-05-08

申请人： Fumio Watanabe ,  Reiki Watanabe

发明人： Fumio Watanabe ,  Reiki Watanabe

IPC分类号： G01L21/32

CPC分类号： G01L21/32 ,  H01J41/04

摘要： An ionization vacuum gauge which has at least three electrodes of a grid (2), an electron source (3) and an ion collector (1) in a vacuum vessel (4) connected in communication with a vacuum apparatus, oscillates electrons emitted front the electron source (3) within and outside of the grid (2), ionizes gas molecules flying into the grid (2) by the oscillated electrons, supplements the ionized ions by the ion collector (1) to convert into a current signal, and measures a gas molecular density (pressure) in the vacuum apparatus according to the obtained current intensity, wherein the ion collector (1) is provided with a heating device for heating the ion collector.

摘要翻译： 在与真空装置连通的真空容器（4）中具有格栅（2），电子源（3）和离子收集器（1）的至少三个电极的电离真空计振荡器 在电网（2）内和外部的电子源（3）通过振荡的电子电离飞入栅格（2）的气体分子，通过离子收集器（1）补充电离离子以转换成电流信号，并测量 根据获得的电流强度在真空装置中的气体分子密度（压力），其中离子收集器（1）设置有用于加热离子收集器的加热装置。