Dibasic ester stripping composition
    1.
    发明授权
    Dibasic ester stripping composition 失效
    二元酯剥离组合物

    公开(公告)号:US5909744A

    公开(公告)日:1999-06-08

    申请号:US63627

    申请日:1998-04-20

    申请人: Javad J. Sahbari

    发明人: Javad J. Sahbari

    摘要: A mixture of a dibasic ester (DBE), an alcohol, and water to remove photoresist from a silicon wafer substrate. Photoresist is effectively removed at ambient temperature with this non-phenolic, non-halogenated stripper solution. Dissolved photoresist is easily separated from the water mixture for disposal.

    摘要翻译: 二元酯(DBE),醇和水的混合物以从硅晶片衬底去除光致抗蚀剂。 用非酚类非卤化剥离剂溶液在环境温度下有效去除光致抗蚀剂。 溶解的光致抗蚀剂容易从水混合物中分离出来处理。