公开(公告)号：US07516507B1

公开(公告)日：2009-04-14

申请号：US10984321

申请日：2004-11-08

申请人： Michael Oxsen ,  Scott Petersen ,  Yassin Mehmandoust

发明人： Michael Oxsen ,  Scott Petersen ,  Yassin Mehmandoust

IPC分类号： B08B11/02

CPC分类号： B08B1/04 ,  B08B3/12 ,  G11B23/505 ,  H01L21/67046

摘要： Substrate preparation systems comprising multi-zone cascade brush scrubbers having sonic assemblies disposed between one or more of the scrubber zones for cleaning of disk-shaped substrates, including silicon wafers and disks for data storage devices, such as hard disk drives (HDD), compact discs (CD) and digital video discs (DVD). The system method combines a sonic particle dislodgement/removal assembly into a cascade brush scrubber line comprising a longi-tudinal array of brush pairs in which the substrates process through preparation zones defined by each pair of brushes, the substrates being transited longitudinally through the zones while rotating on an axis normal to their faces. Piezoelectric transducer arrays transmit sound energy to one or both face(s) of the substrate to dislodge and/or remove particles, and the scrubber simultaneously or thereafter sweeps away the particulates. The sonic energy may be ultrasonic, megasonic, or both, applied to the substrate surface(s) in alternating or sequential process steps.

摘要翻译： 衬底制备系统包括多区级联刷洗涤器，其具有设置在一个或多个洗涤器区域之间的用于清洁盘形基底的声波组件，包括用于数据存储设备的硅晶片和盘，例如硬盘驱动器（HDD），紧凑型 光盘（CD）和数字视频光盘（DVD）。 系统方法将声波粒子移动/移除组件组合成级联刷洗涤器管线，其包括刷子对的纵向阵列，其中衬底通过由每对刷子限定的制备区域进行处理，衬底沿纵向穿过区域，而 在垂直于其脸部的轴上旋转。 压电换能器阵列将声能传递到衬底的一个或两个面，以移除和/或去除颗粒，并且洗涤器同时或此后扫除颗粒。 声波能量可以是超声波，兆声波或两者，以交替或顺序的工艺步骤施加到衬底表面。

公开(公告)号：US20070006406A1

公开(公告)日：2007-01-11

申请号：US11456201

申请日：2006-07-08

申请人： John McEntee ,  David Frost ,  Bryan Riley

发明人： John McEntee ,  David Frost ,  Bryan Riley

IPC分类号： B08B1/02

CPC分类号： B08B1/02 ,  B08B1/04 ,  G11B23/505 ,  H01L21/67046 ,  H01L21/67706 ,  H01L21/67712 ,  H01L21/67748 ,  H01L21/67754 ,  H01L21/68707

摘要： Small form factor pallet assembly, comprising a slotted plate having at opposite ends a mandrel drive assembly and an idler assembly, each with end fittings for engaging the drive and manifold block of a cascade-type scrubber permits scrubbing of SFF substrates by replacement of LFF scrub brushes with the SFF pallet. The SFF pallet slot is oriented below its brush nip so SSF substrates can engage the LFF rotation belt and transport drive. The drive chain is fitted with multi-finger yokes of different sizes so that several sizes of SFF substrates can be scrubbed in the pallet with a single chain. Trolleys for lateral transport of substrates from the input zone to the scrubber lane and from it to the output bay are disclosed. The inventive SFF pallet system meets the changing needs of the hard drive industry, and its retrofit capacity extends the life of already-installed LFF cascade scrubbers.

摘要翻译： 小尺寸托盘组件，包括开槽板，其相对端具有心轴驱动组件和惰轮组件，每个组件具有用于接合级联式洗涤器的驱动和歧管块的端部配件，允许通过更换LFF擦洗来擦洗SFF衬底 刷子与SFF托盘。 SFF托盘槽位于其刷辊的下方，因此SSF基板可以接合LFF旋转带和输送驱动。 驱动链配有不同尺寸的多指指杆，以便可以使用单个链条在托盘中擦洗几种尺寸的SFF基板。 公开了用于将衬底从输入区域侧向运送到洗涤器通道并从其到输出托架的手推车。 本发明的SFF托盘系统满足了硬盘驱动器行业不断变化的需求，其改造能力延长了已安装的LFF级联洗涤器的使用寿命。