公开(公告)号：US07228742B2

公开(公告)日：2007-06-12

申请号：US11418768

申请日：2006-05-05

申请人： Seung Soo Hong ,  Yong Hyeon Shin ,  Kwang Hwa Chung

发明人： Seung Soo Hong ,  Yong Hyeon Shin ,  Kwang Hwa Chung

IPC分类号： G01L11/00

CPC分类号： G01L21/08

摘要： Disclosed is a pressure measuring system for a vacuum chamber, in particular, a pressure measuring system for a vacuum chamber using ultrasonic wave. In this regard, there is provided a pressure measuring system for a vacuum chamber using ultrasonic wave, comprising a vacuum chamber 10 formed with desired vacuum at the inside thereof; ultrasonic wave-emitting means mounted close to an outer peripheral surface of the vacuum chamber 10 for emitting an ultrasonic wave 62 to the inside of the vacuum chamber 10; ultrasonic wave-receiving means for receiving a reflection wave 64 reflected after the striking of the ultrasonic wave 62 emitted from the ultrasonic wave-emitting means to the vacuum chamber; reflection wave-detecting means for detecting the reflection wave 64 from the ultrasonic wave-receiving means; and amplitude-analyzing means for analyzing the amplitude of the reflection wave 64 detected by the reflection wave-detecting means.

摘要翻译： 公开了一种用于真空室的压力测量系统，特别是使用超声波的真空室的压力测量系统。 在这方面，提供了一种使用超声波的真空室的压力测量系统，包括在其内部形成有所需真空的真空室10; 安装在真空室10的外周面的超声波发射装置，用于向真空室10的内部发射超声波62; 超声波接收装置，用于接收从超声波发射装置发射到超声波发射装置的超声波62的撞击之后反射的反射波64; 用于从超声波接收装置检测反射波64的反射波检测装置; 以及幅度分析装置，用于分析由反射波检测装置检测的反射波64的振幅。

公开(公告)号：US20070068260A1

公开(公告)日：2007-03-29

申请号：US11418768

申请日：2006-05-05

申请人： Seung Hong ,  Yong Shin ,  Kwang Chung

发明人： Seung Hong ,  Yong Shin ,  Kwang Chung

IPC分类号： G01L11/00

CPC分类号： G01L21/08

摘要： Disclosed is a pressure measuring system for a vacuum chamber, in particular, a pressure measuring system for a vacuum chamber using ultrasonic wave. In this regard, there is provided a pressure measuring system for a vacuum chamber using ultrasonic wave, comprising a vacuum chamber 10 formed with desired vacuum at the inside thereof; ultrasonic wave-emitting means mounted close to an outer peripheral surface of the vacuum chamber 10 for emitting an ultrasonic wave 62 to the inside of the vacuum chamber 10; ultrasonic wave-receiving means for receiving a reflection wave 64 reflected after the striking of the ultrasonic wave 62 emitted from the ultrasonic wave-emitting means to the vacuum chamber; reflection wave-detecting means for detecting the reflection wave 64 from the ultrasonic wave-receiving means; and amplitude-analyzing means for analyzing the amplitude of the reflection wave 64 detected by the reflection wave-detecting means.