公开(公告)号：US5939852A

公开(公告)日：1999-08-17

申请号：US919480

申请日：1997-08-28

申请人： Kotaro Akutsu ,  Eiji Osanai ,  Hirohito Ito

发明人： Kotaro Akutsu ,  Eiji Osanai ,  Hirohito Ito

IPC分类号： H01L21/027 ,  B23Q1/62 ,  B23Q5/28 ,  B23Q11/00 ,  G03F7/20 ,  G05B19/23 ,  G05B5/01 ,  G05B19/18

CPC分类号： G03F7/70716 ,  B23Q1/621 ,  B23Q11/0032 ,  B23Q5/28 ,  G03F7/709 ,  G05B19/232 ,  G05B2219/37275 ,  G05B2219/49275 ,  G05B2219/49276

摘要： A stage feeding device has a movable guide which is guided on a reference surface of a platen to be movable in the Y-direction, a Y-linear motor for moving the movable guide in the Y-direction, a movable stage which is supported by the movable guide to be movable in the X-direction, and carries an object, and an X-linear motor for moving the movable stage in the X-direction. The stator of the X-linear motor is supported by a second stationary guide to be movable in only the Y-direction independently of the movable guide, and is moved in the Y-direction by a driving mechanism. The stator of the Y-linear motor and the second stationary guide are fixed to the base, and mount members for removing vibrations are arranged between the base and the platen.

摘要翻译： 台架供给装置具有可在Y方向上可移动的台板的基准面上引导的可动引导件，Y方向上移动可动引导件的Y线性马达，由Y方向支承的可动引导件 所述可动引导件能够沿X方向移动并承载物体;以及X线性电动机，用于沿X方向移动所述可动台。 X线性电动机的定子由第二固定引导件支撑，仅在Y方向上可移动地独立于可动引导件，并且通过驱动机构沿Y方向移动。 Y线性电动机的定子和第二静止导轨固定在基座上，用于去除振动的安装构件设置在基座和压板之间。