公开(公告)号：US08773018B2

公开(公告)日：2014-07-08

申请号：US13358018

申请日：2012-01-25

申请人： Paul F. Hensley

发明人： Paul F. Hensley

IPC分类号： H01J7/24

CPC分类号： H05H1/2406 ,  H05B41/2806 ,  H05H1/0093 ,  H05H2001/2412 ,  Y02B20/22

摘要： Apparatus and methods for generating and optimizing a plasma discharge are provided. The device includes a plasma generating device, one or more sensors, and at least one controller for adjusting the plasma in light of the sensed characteristics. Methods for optimizing a plasma, particularly a spatially disoriented plasma discharge include generating a plasma, sensing one or more plasma characteristics, modifying one or more plasma generating properties to optimize the plasma.

摘要翻译： 提供了用于产生和优化等离子体放电的装置和方法。 该装置包括等离子体产生装置，一个或多个传感器，以及至少一个控制器，用于根据检测到的特性来调节等离子体。 用于优化等离子体，特别是空间偏心等离子体放电的方法包括产生等离子体，感测一种或多种等离子体特性，修改一种或多种等离子体产生性质以优化等离子体。

公开(公告)号：US06753499B1

公开(公告)日：2004-06-22

申请号：US09980379

申请日：2001-11-28

申请人： Mitsuo Yasaka ,  Masayoshi Takeshita

发明人： Mitsuo Yasaka ,  Masayoshi Takeshita

IPC分类号： B23K1000

CPC分类号： G01N29/38 ,  B01J19/088 ,  B01J19/10 ,  B01J2219/0894 ,  G01H1/00 ,  G01N29/0618 ,  G01N29/14 ,  G01N29/223 ,  G01N29/4436 ,  G01N29/4445 ,  G01N2291/011 ,  G01N2291/015 ,  G01N2291/0258 ,  G01N2291/105 ,  H01J37/32082 ,  H01J37/32935 ,  H01J37/34 ,  H01J2237/0206 ,  H05H1/0093

摘要： An anomalous arc discharge detection apparatus, including multiplicity of ultrasonic detectors placed at different sections of a plasma processing chamber such that an ultrasonic wave accompanying an anomalous discharge is detected by the ultrasonic detectors at different propagation times or with different delay times. The detected signals are compared with each other on the same time axis to obtain the maximum range of variation of the detected waveforms and the differences in delay time of the respective ultrasonic detectors. From the comparison of the maximum range of variation and the delay times of the ultrasonic detectors, the position of the source point, and the level as well, of the anomalous arc discharge are determined, which can be displayed on a monitor and utilized to issue an alarm if necessary. The position of the anomalous discharge may be obtained by an asymptotic approximation based on recursive calculations of the distances from the source point to the respective ultrasonic detectors using formulas which define the distances in terms of the delay times. This can be done using only four ultrasonic detectors arranged on the wall of the processing chamber. An AE sensor hold case is provided to accommodate an AE sensor. The hold sensor has a lower cover which has one end to be glued onto an appropriate position of the processing chamber, and an upper cover which pushes the AE sensor against the lower cover with an adequate pressure.

摘要翻译： 一种异常电弧放电检测装置，包括放置在等离子体处理室的不同部分的多个超声波检测器，使得伴随异常放电的超声波在不同的传播时间或不同的延迟时间被超声波检测器检测。 检测出的信号在相同的时间轴上相互比较，以获得检测波形的最大变化范围和各个超声波检测器的延迟时间差。 根据超声波检测器的最大变化范围和延迟时间的比较，确定异常电弧放电的源点位置和电平，可以显示在监视器上并用于发出 必要时发出警报。 可以通过基于使用根据延迟时间定义距离的公式从源点到各个超声波检测器的距离的递归计算的渐近近似来获得异常放电的位置。 这可以仅使用布置在处理室的壁上的四个超声波检测器来完成。 提供AE传感器保持壳以容纳AE传感器。 保持传感器具有下盖，其一端被胶合到处理室的适当位置，以及上盖，以足够的压力将AE传感器推向下盖。

公开(公告)号：US20120187840A1

公开(公告)日：2012-07-26

申请号：US13358018

申请日：2012-01-25

申请人： Paul F. HENSLEY

发明人： Paul F. HENSLEY

IPC分类号： H05B41/36 ,  H05H1/24

CPC分类号： H05H1/2406 ,  H05B41/2806 ,  H05H1/0093 ,  H05H2001/2412 ,  Y02B20/22

摘要： Apparatus and methods for generating and optimizing a plasma discharge are provided. The device includes a plasma generating device, one or more sensors, and at least one controller for adjusting the plasma in light of the sensed characteristics. Methods for optimizing a plasma, particularly a spatially disoriented plasma discharge include generating a plasma, sensing one or more plasma characteristics, modifying one or more plasma generating properties to optimize the plasma.

摘要翻译： 提供了用于产生和优化等离子体放电的装置和方法。 该装置包括等离子体产生装置，一个或多个传感器，以及至少一个控制器，用于根据检测到的特性来调节等离子体。 用于优化等离子体，特别是空间偏心等离子体放电的方法包括产生等离子体，感测一种或多种等离子体特性，修改一种或多种等离子体产生性质以优化等离子体。