公开(公告)号：US06847151B2

公开(公告)日：2005-01-25

申请号：US10242005

申请日：2002-09-11

申请人： John H. Jerman ,  John D. Grade

发明人： John H. Jerman ,  John D. Grade

IPC分类号： H01S3/1055 ,  H01S5/022 ,  H01S5/0687 ,  H01S5/14 ,  H02N1/00 ,  A41F19/08

CPC分类号： H02N1/008

摘要： A balanced microdevice that includes a substrate and at least one comb drive assembly having first and second comb drive members. The first comb drive member is mounted on the substrate and the second comb drive member overlies the substrate. At least one spring member is provided that has a first end portion coupled to the substrate and a second end portion coupled to the second comb drive member. The first comb drive member has a plurality of spaced-apart first comb drive fingers and the second comb drive member has a plurality of spaced-apart second comb drive fingers. The second comb drive member is movable between a first position in which the first and second comb drive fingers are not substantially fully interdigitated and a second position in which the first and second comb drive fingers are substantially fully interdigitated. A counterbalance is carried by the substrate and coupled to the second comb drive member for inhibiting undesirable movement of the second comb drive member in response to externally applied accelerations to the microdevice.

摘要翻译： 一种平衡微型装置，其包括基板和至少一个具有第一和第二梳状驱动构件的梳状驱动组件。 第一梳状驱动构件安装在基底上，第二梳状驱动构件覆盖在基底上。 提供至少一个弹簧构件，其具有联接到基底的第一端部和联接到第二梳状驱动构件的第二端部。 第一梳状驱动构件具有多个间隔开的第一梳状驱动指状物，并且第二梳状驱动构件具有多个间隔开的第二梳状驱动指状物。 第二梳状驱动构件可在其中第一和第二梳状驱动指状件基本上不完全相互交叉的第一位置和第一和第二梳状驱动指状件基本上完全相互交叉的第二位置之间移动。 平衡物由衬底承载并且耦合到第二梳状驱动构件，用于防止第二梳状驱动构件响应于外部施加到微型装置的加速度的不期望的运动。