Low dielectric constant polymer and monomers used in their formation
    1.
    发明授权
    Low dielectric constant polymer and monomers used in their formation 有权
    低介电常数聚合物和用于其形成的单体

    公开(公告)号:US06660820B1

    公开(公告)日:2003-12-09

    申请号:US10205278

    申请日:2002-07-24

    IPC分类号: C08F13616

    CPC分类号: C08F36/20 C08F38/00

    摘要: A new class of fluorinated arylacetylene compounds useful as monomers in the formation of polymers having low dielectric constant. These polymers, which are the reaction products of one of the fluorinated arylacetylene compounds, a diphenyl oxide biscyclopentadienone and, optionally, 1,3,5-tris(phenylacetylene)benzene, are useful in insulating microelectric device.

    摘要翻译: 一类新的氟代芳基乙炔化合物,可用作形成具有低介电常数的聚合物的单体。 这些聚合物是氟化芳基乙炔化合物之一,二苯基氧基双环戊二烯酮和任选的1,3,5-三(苯基乙炔)苯的反应产物,可用于绝缘微电子器件。