公开(公告)号：US06353068B1

公开(公告)日：2002-03-05

申请号：US09394441

申请日：1999-09-09

申请人： Thomas Dietz ,  Eberhard Esselborn ,  Christian Psiorz ,  Ute Schick ,  Stefan Silber ,  Ellen Reuter ,  Dirk Wolfgram

发明人： Thomas Dietz ,  Eberhard Esselborn ,  Christian Psiorz ,  Ute Schick ,  Stefan Silber ,  Ellen Reuter ,  Dirk Wolfgram

IPC分类号： C08F2028

CPC分类号： B01D19/0404 ,  C08F6/006 ,  C08F220/12 ,  C08L33/10 ,  C09D7/65

摘要： Polyacrylates having an average molecular weight of from about 1000 to about 10,000 and the general formula where R4 is the radical of a known chain regulator or initiator, R1 is identical or different and is an alkyl radical, preferably of 1 to 4 carbon atoms, R2 is identical or different and is a saturated or unsaturated alkyl radical of 12 to 22 carbon atoms, R3 is a hydrocarbon radical which carries at least one (meth)acryloxy group, a is from 10 to 50, b is from 3 to 20, c is from 0 to 10, and the ratio a:b+c is from 0.25 to 4 and the ratio b:c is from 1:0 to 1:0.7 as degassing agents for paints and coatings.

摘要翻译： 平均分子量为约1000至约10,000的聚丙烯酸酯和通式R 4是已知的链调节剂或引发剂的基团，R 1相同或不同，为烷基，优选1至4个碳原子，R 2相同 或不同，为12-22个碳原子的饱和或不饱和烷基，R3为携带至少一个（甲基）丙烯酰氧基的烃基，a为10至50，b为3至20，c为 0〜10，比例a：b + c为0.25〜4，比例b:c为1:0〜1:0.7，作为涂料和涂料用脱气剂。

公开(公告)号：US06462158B1

公开(公告)日：2002-10-08

申请号：US09638893

申请日：2000-08-16

申请人： Takuya Miwa ,  Nobuyuki Oka ,  Masao Kaneko

发明人： Takuya Miwa ,  Nobuyuki Oka ,  Masao Kaneko

IPC分类号： C08F2028

CPC分类号： C07D307/00

摘要： Disclosed herein are polymerizable compounds represented by the following formula (1): wherein one of R1 and R2 represents an alkyl group, which has 1 to 4 carbon atoms and is other than a tert-butyl group, and the other represents a hydrogen atom or an alkyl group which has 1 to 4 carbon atoms and is other than a tert-butyl group, R3 to R9 each independently represent a hydrogen atom, a silyl group, a cyano group, a hydroxyl group, a halogen atom or a monovalent nonpolymerizable organic substituent group, and A represents a polymerizable group having a carbon-carbon double bond; polymers obtained by singly polymerizing the polymerizable compounds or copolymerizing them with copolymerizable compounds; and resist compositions comprising the polymers. These polymers are useful as base polymers for resist materials for an exposure light source of a short wavelength.

摘要翻译： 本文公开了由下式（1）表示的可聚合化合物：其中R 1和R 2中的一个表示具有1至4个碳原子并且不是叔丁基的烷基，另一个表示氢原子或 具有1至4个碳原子且不是叔丁基的烷基，R 3至R 9各自独立地表示氢原子，甲硅烷基，氰基，羟基，卤素原子或一价不可聚合的有机物 取代基，A表示具有碳 - 碳双键的可聚合基团; 通过单独聚合可聚合化合物或使它们与可共聚化合物共聚得到的聚合物; 并且抗蚀剂包含聚合物的组合物。 这些聚合物可用作短波长曝光光源的抗蚀剂材料的基础聚合物。