公开(公告)号：US07297906B2

公开(公告)日：2007-11-20

申请号：US11174781

申请日：2005-07-05

申请人： David H. Quach ,  Martin Jeff Salinas

发明人： David H. Quach ,  Martin Jeff Salinas

IPC分类号： H05B3/68 ,  C23C16/80

CPC分类号： H01L21/67184 ,  H01L21/67109 ,  H01L21/67742 ,  H01L21/67748 ,  H01L21/67751

摘要： An integrated thermal unit comprises a bake station comprising a bake plate configured to hold and heat a substrate; a chill station comprising a chill plate configured to hold and cool a substrate; and a substrate transfer shuttle configured to transfer substrates from the bake plate to the chill plate along a horizontally linear path within the thermal unit and raise and lower substrates along a vertical path within the integrated thermal unit.

摘要翻译： 集成热单元包括烘焙站，烘烤站包括构造成保持和加热基材的烘烤板; 冷却站，包括构造成保持和冷却衬底的冷却板; 以及基板传送梭，其构造成沿着所述热单元内的水平线性路径将基板从所述烘烤板传送到所述冷却板，并且沿着所述集成热单元内的垂直路径升高和降低基板。