-
公开(公告)号:US06814573B2
公开(公告)日:2004-11-09
申请号:US10315941
申请日:2002-12-11
申请人: Noboru Hiramoto
发明人: Noboru Hiramoto
IPC分类号: F27B304
CPC分类号: C21D1/773 , C21D9/0018 , F27B9/028 , F27B9/042 , F27B2017/0091 , F27D3/0024 , Y10S414/138
摘要: A vacuum heat-treatment apparatus for heat-treating a workpiece in a treating cell includes a hermetic chamber disposed at the center. A plurality of treating cells are disposed along the periphery of the hermetic chamber, and a workpiece transfer mechanism is disposed inside the hermetic chamber and transfers the workpiece from one of the treating cells to the hermetic chamber and from the hermetic chamber to one of the treating cells.