公开(公告)号：US06171104B2

公开(公告)日：2001-01-09

申请号：US09369371

申请日：1999-08-06

申请人： Yukimasa Saito ,  Hiroyuki Yamamoto

发明人： Yukimasa Saito ,  Hiroyuki Yamamoto

IPC分类号： F27B912

CPC分类号： C30B33/005 ,  C30B29/06

摘要： In a method wherein semiconductor wafers are accommodated within a treatment furnace that has been heated beforehand to a predetermined temperature, the temperature within the treatment furnace is increased to a predetermined treatment temperature, and the semiconductor wafers are subjected to an oxidation treatment, the temperature-increasing step is performed under a reduced pressure. This makes it possible to suppress the formation of natural oxide films during the temperature-increasing step, and thus makes it possible to form an extremely thin film of a superior quality on the semiconductor wafer.

摘要翻译： 在将半导体晶片容纳在预先加热到预定温度的处理炉内的方法中，将处理炉内的温度升高到规定的处理温度，对半导体晶片进行氧化处理， 增加步骤在减压下进行。 这使得可以在升温步骤中抑制天然氧化物膜的形成，从而可以在半导体晶片上形成质量优异的极薄膜。

公开(公告)号：US06361312B1

公开(公告)日：2002-03-26

申请号：US09605603

申请日：2000-06-28

申请人： Sydney M. Pugh ,  Timothy J. N. Smith ,  D. Lowell Misener ,  Reginald W. Smith

发明人： Sydney M. Pugh ,  Timothy J. N. Smith ,  D. Lowell Misener ,  Reginald W. Smith

IPC分类号： F27B912

CPC分类号： F27B17/00 ,  F27B17/02

摘要： The invention is directed to an automated materials processing furnace capable of high temperature operation. The furnace is moveable and enables sample insertion into either end and includes a stationary sample affixed to a replaceable tray. The furnace enables the processing of material samples under both terrestrial and microgravity conditions and also provides for the monitoring of process parameters.

摘要翻译： 本发明涉及能够进行高温操作的自动化材料加工炉。 炉子是可移动的，并使得样品插入任一端并且包括固定在可替换托盘上的固定样品。 该炉能够在地球和微重力条件下处理材料样品，并且还提供对工艺参数的监测。

公开(公告)号：US06283747B1

公开(公告)日：2001-09-04

申请号：US09399158

申请日：1999-09-20

申请人： Thierry Legiret ,  Gérard Le Gouefflec ,  Thierry Borissoff ,  Olivier Charon

发明人： Thierry Legiret ,  Gérard Le Gouefflec ,  Thierry Borissoff ,  Olivier Charon

IPC分类号： F27B912

CPC分类号： F23D14/32 ,  F23L2900/07006 ,  Y02E20/344

摘要： The invention relates to a method for heating a furnace comprising at least one burner capable of operating on an oxidant the oxygen content of which can vary; in a first period (P1) the burner is supplied with practically pure oxygen so as to provide a large amount of energy for heating, in a second period (P2) the burner is supplied with an oxidant, the oxygen content of which can vary between about 100% and 21%, in a third period (P3), the burner is supplied with an oxidant, the oxygen content of which is minimal, and which corresponds to a pilot period which requires only a small amount of heating energy. This method makes it possible to optimize the use of the furnace according to the desired thermal performance and oxidant operating costs.

摘要翻译： 本发明涉及一种用于加热炉子的方法，所述炉子包括至少一个能够在其氧含量可以变化的氧化剂上操作的燃烧器; 在第一时段（P1）中，燃烧器被供应几乎纯氧，以便提供大量的加热能量，在第二时段（P2）中，燃烧器被供给氧化剂，其氧含量可以在 大约100％和21％，在第三个时间段（P3）中，燃烧器供给氧气，其氧含量最小，这对应于仅需要少量加热能量的先导期。 该方法可以根据期望的热性能和氧化剂操作成本优化炉的使用。