公开(公告)号：US20040206919A1

公开(公告)日：2004-10-21

申请号：US10822720

申请日：2004-04-13

Applicant: Canon Kabushiki Kaisha

Inventor： Masahiko Okunuki ,  Hiroya Ohta

IPC: H01J037/304 ,  H01J037/065

CPC classification number: H01J37/065

Abstract: An electron gun includes a cathode portion (1) which emits electrons, an anode portion (3) which accelerates the emission electrons, a bias portion (2) which is arranged between the cathode portion and anode portion and controls trajectories of the emission electrons, a shielding portion (12) which is arranged below the anode portion and shields some of the emission electrons, and a cooling portion (14) which cools the shielding portion.

Abstract translation: 电子枪包括发射电子的阴极部分（1），加速发射电子的阳极部分（3），设置在阴极部分和阳极部分之间并控制发射电子轨迹的偏压部分（2） 布置在所述阳极部下方并屏蔽所述发射电子的一部分的遮蔽部（12）以及冷却所述遮蔽部的冷却部（14）。

公开(公告)号：US20030155525A1

公开(公告)日：2003-08-21

申请号：US10295951

申请日：2002-11-18

Inventor： Akimitsu Okura ,  Masashi Kimura ,  Kenichi Hirane ,  Yoshihiko Nakayama

IPC: H01J037/065

CPC classification number: H01J37/241 ,  H01J2237/0206

Abstract: Disclosed is an electron beam apparatus and method which can retain the state that minimizes the amount of water content contained at a gap between a high-voltage cable and a high-voltage introduction insulator to thereby prevent creation of high-voltage discharge and current leakage. The apparatus comprises a means for applying a high voltage to an acceleration electrode while eliminating electron release from an electron source and for detecting a change in an emission current corresponding to a change in an acceleration voltage at this time. In addition, the apparatus comprises a means for issuing a cautionary notice or warning when the change of this emission current exceeds a prespecified value. Further, the apparatus comprises a means for letting a dry gas flow in a gap portion between the electron gun's high-voltage cable and the high-voltage introduction insulator to thereby dehumidify said gap portion. With such an arrangement, it is possible to prevent high-voltage discharge due to an increase in water content of the gap portion and also instability of an electron beam due to a leakage current.

Abstract translation: 公开了一种电子束装置和方法，其可以保持使高压电缆和高压引入绝缘体之间的间隙中含有的含水量最小化的状态，从而防止高压放电和电流泄漏的产生。 该装置包括用于向加速电极施加高电压同时消除电子从电子源的释放并且用于检测与此时加速电压的变化相对应的发射电流的变化的装置。 此外，该装置包括当该发射电流的变化超过预定值时发出警告通知或警告的装置。 此外，该装置包括用于使干燥气体在电子枪的高压电缆和高压引入绝缘体之间的间隙部分中流动从而对所述间隙部分进行除湿的装置。 通过这样的布置，可以防止由于间隙部分的水分含量增加引起的高压放电以及由于漏电流引起的电子束的不稳定性。