公开(公告)号：US06734429B2

公开(公告)日：2004-05-11

申请号：US10395263

申请日：2003-03-25

Applicant: Shigenori Takagi

Inventor： Shigenori Takagi

IPC: H01J3282

CPC classification number: H01J37/28 ,  H01J37/026

Abstract: Eliminating charge of the specimen is performed by applying an acceleration voltage to an electron gun and applying primary electrons to a charged-up specimen from the electron gun. The maximum value of the acceleration voltages of the primary electrons applied in the past is adopted as charge elimination start acceleration voltage. The acceleration voltage is gradually dropped from the charge elimination start voltage so as to emit electrons charged on the specimen. The acceleration voltage is applied continuously until the specimen charged negatively becomes uncharged or is charged positively. A plurality of specimens are previously compared with respect to the acceleration voltage at which the secondary electron emission efficiency becomes 1 and charge elimination termination voltage at which dropping the acceleration voltage is terminated is set to the minimum acceleration voltage or less.

Abstract translation: 通过向电子枪施加加速电压并将电子从电子枪施加到带电的样品上来进行样品的去除电荷。 采用过去施加的一次电子的加速电压的最大值作为电荷消除开始加速电压。 加速电压从电荷消除开始电压逐渐下降，以发射充电在试样上的电子。 连续施加加速电压，直到带负电的样品变得不充电或带正电。 预先将多个试样与二次电子发射效率为1的加速电压进行比较，将加速电压下降的电荷消除终止电压设定为最小加速电压以下。