摘要:
In an embodiment of the invention an operating device for a glass ceramic hob (25) can be provided and has an operating unit (11). The operating unit (11) has a rotary toggle (12), which is magnetically mounted on a glass ceramic hob (25). A bearing device (13) below the glass ceramic hob has guide magnets (15), which form a magnetically acting guide link, which permits both a rotary movement (R) and a linear movement (L) of the rotary toggle (12). The rotary toggle (12) has signalling magnets (19) along its outer circumference and with them are associated beneath the hob (25) Hall sensors (21). Further Hall sensors (22) are positioned between the guide magnets (15). A random movement (R, L) of the rotary toggle (12) can be detected with the Hall sensors (21, 22). The operating unit (11) can be removed. The glass ceramic hob (25) requires no openings or the like.
摘要:
The present invention relates to systems and methods for mitigating pattern collapse in ultra-thin resist processing. In one embodiment, the present invention relates to etching extremely fine patterns into a hardmask immediately after developing an ultra-thin resist, wherein the resist is not dried.