Array substrate for LCD device having double-layered metal structure and manufacturing method thereof
    1.
    发明授权
    Array substrate for LCD device having double-layered metal structure and manufacturing method thereof 有权
    具有双层金属结构的液晶显示装置用阵列基板及其制造方法

    公开(公告)号:US07277138B2

    公开(公告)日:2007-10-02

    申请号:US10878516

    申请日:2004-06-29

    IPC分类号: G02F1/136 H01L69/04

    摘要: An array substrate for a liquid crystal display device includes a gate electrode, a gate line and a gate pad electrode disposed on a substrate, each of the gate electrode, the gate line and the gate pad electrode having a first metal barrier layer, a first copper alloy layer, and a first out-diffusion film, and the first out-diffusion film completely covering, surrounding and contacting entire surfaces of the first copper alloy layer. The array substrate includes a gate insulation layer disposed on the substrate and covering the gate electrode, the gate line and the gate pad electrode. An active layer and an ohmic contact layer are sequentially formed on the gate insulation layer and over the gate electrode. A data line is formed on the gate insulation layer and perpendicularly crosses the gate line. A source electrode and a drain electrode contact the ohmic contact layer.

    摘要翻译: 用于液晶显示装置的阵列基板包括栅电极,栅极线和设置在基板上的栅极焊盘电极,栅极电极,栅极线和栅极焊盘电极中的每一个具有第一金属阻挡层,第一 铜合金层和第一外扩散膜,第一外扩散膜完全覆盖,包围并接触第一铜合金层的整个表面。 阵列基板包括设置在基板上并覆盖栅极,栅极线和栅极焊盘电极的栅极绝缘层。 有源层和欧姆接触层依次形成在栅极绝缘层上和栅电极上。 数据线形成在栅极绝缘层上并垂直于栅极线。 源电极和漏极接触欧姆接触层。