公开(公告)号：WO2019094288A1

公开(公告)日：2019-05-16

申请号：PCT/US2018/058894

申请日：2018-11-02

Applicant: VEECO PRECISION SURFACE PROCESSING LLC

Inventor： VIT, Paul ,  BREINGAN, William, Gilbert ,  HOFMEISTER, Christopher

IPC: H01L21/67

Abstract: A dispense arm device for controllably discharging a fluid onto a substrate includes a dispense head coupled to and contained within an arm portion of the dispense arm device, wherein the dispense head having a valve assembly that is configured to operate in: (1) a recirculation mode in which a dispense outlet formed in the dispense head is closed off and a recirculation path is opened for allowing heated chemistry that is delivered to the dispense head to be delivered back from the dispense head to a remote location (e.g., a recycle tank); and (2) a dispense mode in which the dispense outlet is opened to allow heated chemistry to be discharged from the dispense head and the recirculation path is closed off.