公开(公告)号：WO2004013568A2

公开(公告)日：2004-02-12

申请号：PCT/US2003/024916

申请日：2003-08-06

Applicant: TIMBRE TECHNOLOGIES, INC. ,  DREGE, Emmanuel ,  BAO, Junwei ,  DODDI, Srinivas ,  VUONG, Vi

Inventor： DREGE, Emmanuel ,  BAO, Junwei ,  DODDI, Srinivas ,  VUONG, Vi

IPC: G01B

CPC classification number: G03F7/70516 ,  G01N21/956 ,  G03F7/70625

Abstract: To generate sets of coefficients for use in optical metrology of semiconductor structures, at least three optical metrology signals for a set of parameters are obtained. The optical metrology signals are indicative of light diffracted from a semiconductor structure, and a value of at least one parameter of the set of parameters is varied to produce each signal. Functional relationships between the at least three optical metrology signals are obtained, the functional relationships including at least three coefficient values. At least three sets of coefficients from the at least three coefficient values of the functional relationships are determined.

Abstract translation: 为了生成用于半导体结构的光学计量的系数集合，获得用于一组参数的至少三个光学计量信号。 光学计量信号指示从半导体结构衍射的光，并且该组参数中的至少一个参数的值被改变以产生每个信号。 获得所述至少三个光学度量信号之间的函数关系，所述函数关系包括至少三个系数值。 确定来自功能关系的至少三个系数值的至少三组系数。

公开(公告)号：WO2007103302A3

公开(公告)日：2008-08-28

申请号：PCT/US2007005573

申请日：2007-03-05

Applicant: TOKYO ELECTRON LTD ,  VUONG VI ,  BAO JUNWEI ,  LI SHIFANG ,  CHEN YAN

Inventor： VUONG VI ,  BAO JUNWEI ,  LI SHIFANG ,  CHEN YAN

IPC: G06F15/00 ,  G01B11/14

CPC classification number: G01B11/24

Abstract: A weighting function is obtained to enhance measured diffraction signals used in optical metrology. To obtain the weighting function, a measured diffraction signal is obtained. The measured diffraction signal was measured from a site on a wafer using a photometric device. A first weighting function is defined based on noise that exists in the measured diffraction signal. A second weighting function is defined based on accuracy of the measured diffraction signal. A third weighting function is defined based on sensitivity of the measured diffraction signal. A fourth weighting function is defined based on one or more of the first, second, and third weighting functions.

Abstract translation: 获得加权函数以增强光学计量学中使用的测量衍射信号。 为了获得加权函数，获得测量的衍射信号。 使用光度测量装置从晶片上的位置测量测量的衍射信号。 基于存在于测量的衍射信号中的噪声来定义第一加权函数。 基于测量的衍射信号的精度来定义第二加权函数。 基于测量的衍射信号的灵敏度来定义第三加权函数。 基于第一，第二和第三加权函数中的一个或多个来定义第四加权函数。