公开(公告)号：WO2003075368A3

公开(公告)日：2003-09-12

申请号：PCT/US2003/006048

申请日：2003-02-28

Applicant: BOARD OF CONTROL OF MICHIGAN TECHNOLOGICAL UNIVERSITY ,  BERGSTROM, Paul, L. ,  TROMBLEY, Melissa, L.

Inventor： BERGSTROM, Paul, L. ,  TROMBLEY, Melissa, L.

IPC: H01L21/00

Abstract: A method of performing regional heating of a system having a substrate. The method may include applying a thin film to the system, and controllably energizing a coil positioned near the thin film. The energized coils thereby generate a magnetic flux. The method further includes inducing a current in the thin film with the magnetic flux thereby heating the system.

公开(公告)号：WO2003075368A2

公开(公告)日：2003-09-12

申请号：PCT/US2003/006048

申请日：2003-02-28

Applicant: BOARD OF CONTROL OF MICHIGAN TECHNOLOGICAL UNIVERSITY ,  BERGSTROM, Paul, L. ,  TROMBLEY, Melissa, L.

Inventor： BERGSTROM, Paul, L. ,  TROMBLEY, Melissa, L.

IPC: H01L49/00

CPC classification number: H05B6/105 ,  H01L21/324 ,  H01L21/67103

Abstract: A method of performing regional heating of a system having a substrate. The method may include applying a thin film to the system, and controllably energizing a coil positioned near the thin film. The energized coils thereby generate a magnetic flux. The method further includes inducing a current in the thin film with the magnetic flux thereby heating the system.

Abstract translation: 对具有基板的系统进行区域加热的方法。 该方法可以包括将薄膜施加到系统，并且可控地激励位于薄膜附近的线圈。 因此，通电线圈产生磁通量。 该方法还包括利用磁通量引起薄膜中的电流，从而加热系统。