公开(公告)号：WO2002095353A2

公开(公告)日：2002-11-28

申请号：PCT/US2002/015132

申请日：2002-05-17

Applicant: UNIVERSITY OF MARYLAND, BALTIMORE COUNTY ,  SHIH, Yanhua ,  D'ANGELO, Milena ,  CHEKHOVA, Maria

Inventor： SHIH, Yanhua ,  D'ANGELO, Milena ,  CHEKHOVA, Maria

IPC: G01N

CPC classification number: G03F7/70375

Abstract: A microscopic image product comprising a light source that produces light that is made of entangled photons. Light made of entangled photons is used in lithography and other applications producing improved resolution for microscopic images.

Abstract translation: 用于观察多光子纠缠光通过第一透镜（透镜1），第二透镜（透镜2）并撞击在表面（图像）上以观察样品的光刻产品的显微镜。

公开(公告)号：WO02095353A3

公开(公告)日：2003-02-27

申请号：PCT/US0215132

申请日：2002-05-17

Applicant: UNIV MARYLAND ,  SHIH YANHUA ,  D ANGELO MILENA ,  CHEKHOVA MARIA

Inventor： SHIH YANHUA ,  D ANGELO MILENA ,  CHEKHOVA MARIA

IPC: G03F7/20 ,  G01N21/63

CPC classification number: G03F7/70375

Abstract: A microscope for observing a lithographic product where multi-photon entangled light passes through a first lens (Lens 1), a second lens (Lens 2) and impinges on a surface plane (Image) to observe a specimen.

Abstract translation: 用于观察多光子纠缠光通过第一透镜（透镜1），第二透镜（透镜2）并撞击在表面（图像）上以观察样品的光刻产品的显微镜。