GRAPHENE MANUFACTURING APPARATUS AND METHOD
    1.
    发明申请

    公开(公告)号:WO2012002666A3

    公开(公告)日:2012-01-05

    申请号:PCT/KR2011/004524

    申请日:2011-06-22

    Abstract: A graphene manufacturing apparatus includes a gas supplying unit supplying a gas including carbon; a gas heating unit heating the gas supplied from the gas supplying unit; a deposition chamber in which a substrate having a catalyst layer is disposed; and an inlet pipe introducing the gas of the gas heating unit into the deposition chamber. A temperature of the deposition chamber is set at a temperature lower than a temperature of the gas heating unit so that a selection range with respect to a catalyst metal to be used in the catalyst layer may be expanded, and damage of the substrate due to a high temperature heat may be minimized.

    GRAPHENE MANUFACTURING APPARATUS AND METHOD
    2.
    发明申请
    GRAPHENE MANUFACTURING APPARATUS AND METHOD 审中-公开
    石墨制造设备和方法

    公开(公告)号:WO2012002666A2

    公开(公告)日:2012-01-05

    申请号:PCT/KR2011004524

    申请日:2011-06-22

    Abstract: A graphene manufacturing apparatus includes a gas supplying unit supplying a gas including carbon; a gas heating unit heating the gas supplied from the gas supplying unit; a deposition chamber in which a substrate having a catalyst layer is disposed; and an inlet pipe introducing the gas of the gas heating unit into the deposition chamber. A temperature of the deposition chamber is set at a temperature lower than a temperature of the gas heating unit so that a selection range with respect to a catalyst metal to be used in the catalyst layer may be expanded, and damage of the substrate due to a high temperature heat may be minimized.

    Abstract translation: 石墨烯制造装置包括:供给包含碳的气体的气体供给单元; 气体加热单元,加热从气体供给单元供给的气体; 沉积室,其中设置有具有催化剂层的基板; 以及将气体加热单元的气体引入沉积室的入口管。 淀积室的温度设定在低于气体加热单元的温度的温度,使得相对于催化剂层中使用的催化剂金属的选择范围可能扩大,并且由于 可以将高温热量最小化。

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