Abstract:
A graphene manufacturing apparatus includes a gas supplying unit supplying a gas including carbon; a gas heating unit heating the gas supplied from the gas supplying unit; a deposition chamber in which a substrate having a catalyst layer is disposed; and an inlet pipe introducing the gas of the gas heating unit into the deposition chamber. A temperature of the deposition chamber is set at a temperature lower than a temperature of the gas heating unit so that a selection range with respect to a catalyst metal to be used in the catalyst layer may be expanded, and damage of the substrate due to a high temperature heat may be minimized.
Abstract:
A graphene manufacturing apparatus includes a gas supplying unit supplying a gas including carbon; a gas heating unit heating the gas supplied from the gas supplying unit; a deposition chamber in which a substrate having a catalyst layer is disposed; and an inlet pipe introducing the gas of the gas heating unit into the deposition chamber. A temperature of the deposition chamber is set at a temperature lower than a temperature of the gas heating unit so that a selection range with respect to a catalyst metal to be used in the catalyst layer may be expanded, and damage of the substrate due to a high temperature heat may be minimized.
Abstract:
Provided is a method of post treating graphene and a method of manufacturing graphene using the post treatment method. The method includes providing a metal thin film on which graphene is formed, disposing a liquid phase carrier on the graphene, hardening the carrier, and separating the carrier and the graphene from the metal thin film.
Abstract:
Provided is a method of post treating graphene and a method of manufacturing graphene using the post treatment method. The method includes providing a metal thin film on which graphene is formed, disposing a liquid phase carrier on the graphene, hardening the carrier, and separating the carrier and the graphene from the metal thin film.