公开(公告)号：WO2003046498A1

公开(公告)日：2003-06-05

申请号：PCT/NO2002/000355

申请日：2002-10-02

Applicant: SINVENT AS ,  JOHANSEN, Ib-Rune ,  ROGNE, Henrik ,  WANG, Dag ,  FISMEN, Britta, Grennberg ,  AVSET, Berit, Sundby ,  FERBER, Alain ,  BERNSTEIN, Ralph, W.

Inventor： JOHANSEN, Ib-Rune ,  ROGNE, Henrik ,  WANG, Dag ,  FISMEN, Britta, Grennberg ,  AVSET, Berit, Sundby ,  FERBER, Alain ,  BERNSTEIN, Ralph, W.

IPC: G01L9/00

CPC classification number: H04R23/008 ,  G01L9/0079

Abstract: This invention relates to an optical displacement sensor element, e.g. for use in a pressure sensor or a microphone, comprising two essentially flat surfaces being separated by a cavity being defined by a spacer, the distance between the surfaces being variable thus providing a displacement sensitive Fabry-Perot interferometer. Both of said surfaces are at least partially reflective, and in that said first surface is provided with at least one optical detector, and one of surfaces being provided on an at least partially transparent material.

Abstract translation: 本发明涉及一种光学位移传感器元件，例如， 用于压力传感器或麦克风，包括由间隔件限定的空腔分开的两个基本平坦的表面，表面之间的距离是可变的，从而提供位移敏感的法布里 - 珀罗干涉仪。 所述两个表面至少部分地具有反射性，并且所述第一表面设置有至少一个光学检测器，并且其中一个表面设置在至少部分透明的材料上。