公开(公告)号：WO2006041196A8

公开(公告)日：2006-06-29

申请号：PCT/JP2005019165

申请日：2005-10-12

Applicant: TOSHIBA KK ,  EBARA CORP ,  KUBOTA TAKEO ,  SHIGETA ATSUSHI ,  TOYOTA GEN ,  TAKAHASHI TAMAMI ,  FUKUOKA DAISAKU ,  ITO KENYA

Inventor： KUBOTA TAKEO ,  SHIGETA ATSUSHI ,  TOYOTA GEN ,  TAKAHASHI TAMAMI ,  FUKUOKA DAISAKU ,  ITO KENYA

IPC: H01L21/304 ,  B24B9/00 ,  B24B21/00

CPC classification number: H01L21/02021 ,  B24B9/065 ,  B24B21/002

Abstract: A polishing apparatus has a polishing tape (21), a supply reel (22) for supplying the polishing tape (21) to a contact portion (30) at which the polishing tape (21) is brought into contact with a notch portion (11) of a substrate (10), and a take-up reel (23) for winding up the polishing tape (21) from the contact portion (30). The polishing apparatus also has a first guide portion (24) having a guide surface (241) for supplying the polishing tape (21) directly to the contact portion (30), and a second guide portion (25) having a guide surface for supplying the polishing tape (21) to the take-up reel (23). The guide surface (241) of the first guide portion (24) and/or the guide surface of the second guide portion (25) has a shape corresponding to a shape of the notch portion (11) of the substrate (10).

Abstract translation: 抛光装置具有研磨带（21），用于将研磨带（21）供给到研磨带（21）与切口部（11）接触的接触部（30）的供带盘（22） ）和用于从所述接触部（30）卷绕所述研磨带（21）的卷取卷轴（23）。 抛光装置还具有第一引导部分（24），其具有用于将研磨带（21）直接供应到接触部分（30）的引导表面（241）和具有用于供应的引导表面的第二引导部分（25） 研磨带（21）到卷取卷轴（23）。 第一引导部（24）的引导面（241）和/或第二引导部（25）的引导面具有与基板（10）的切口部（11）的形状对应的形状。

公开(公告)号：WO2006041196A1

公开(公告)日：2006-04-20

申请号：PCT/JP2005/019165

申请日：2005-10-12

Applicant: Kabushiki Kaisha Toshiba ,  EBARA CORPORATION ,  KUBOTA, Takeo ,  SHIGETA, Atsushi ,  TOYOTA, Gen ,  TAKAHASHI, Tamami ,  FUKUOKA, Daisaku ,  ITO, Kenya

Inventor： KUBOTA, Takeo ,  SHIGETA, Atsushi ,  TOYOTA, Gen ,  TAKAHASHI, Tamami ,  FUKUOKA, Daisaku ,  ITO, Kenya

IPC: H01L21/304 ,  B24B9/00 ,  B24B21/00

CPC classification number: H01L21/02021 ,  B24B9/065 ,  B24B21/002

Abstract: A polishing apparatus has a polishing tape (21), a supply reel (22) for supplying the polishing tape (21) to a contact portion (30) at which the polishing tape (21) is brought into contact with a notch portion (11) of a substrate (10), and a take-up reel (23) for winding up the polishing tape (21) from the contact portion (30). The polishing apparatus also has a first guide portion (24) having a guide surface (241) for supplying the polishing tape (21) directly to the contact portion (30), and a second guide portion (25) having a guide surface for supplying the polishing tape (21) to the take-up reel (23). The guide surface (241) of the first guide portion (24) and/or the guide surface of the second guide portion (25) has a shape corresponding to a shape of the notch portion (11) of the substrate (10).

Abstract translation: 抛光装置具有抛光带（21），用于将抛光带（21）供应到带有抛光带（21）的接触部分（30）的供应带盘（22） 与基片（10）的切口部分（11）接触;以及卷取卷轴（23），用于从接触部分（30）卷绕抛光带（21）。 该抛光装置还具有第一导向部分（24）和第二导向部分（25），该第一导向部分具有用于将抛光带（21）直接供应到接触部分（30）的导向表面（241） 将研磨带（21）送到卷取卷轴（23）。 第一引导部分（24）的引导表面（241）和/或第二引导部分（25）的引导表面具有与基板（10）的凹口部分（11）的形状相对应的形状。 / p>