公开(公告)号：WO2013019776A3

公开(公告)日：2013-02-07

申请号：PCT/US2012/048940

申请日：2012-07-31

申请人： UNIVERSITY OF FLORIDA RESEARCH FOUNDATION, INC. ,  WAN, Xiaoke ,  GE, Jian

发明人： WAN, Xiaoke ,  GE, Jian

IPC分类号： G01B9/02

摘要： A scanning monochromatic spatial low-coherent interferometer (S-LCI) can be used to simultaneously measure geometric thickness and refractive index. The probe beam of the scanning S-LCI can be an off-axis converging single wavelength laser beam, and the decomposed incident angles of the beam on the sample can be accurately defined in the Fourier domain. The angle dependent phase shift of a plane parallel plate or other sample can be obtained in a single system measurement. From the angle dependent phase shift, the geometric thickness and refractive index of the sample can be simultaneously obtained. Additionally or alternatively, the S-LCI system can interrogate the sample to profile the location and refractive index of one or more layers within the sample using the disclosed techniques.

公开(公告)号：WO2009126546A1

公开(公告)日：2009-10-15

申请号：PCT/US2009/039588

申请日：2009-04-06

申请人： UNIVERSITY OF FLORIDA RESEARCH FOUNDATION, INC. ,  WAN, Xiaoke ,  GE, Jian

发明人： WAN, Xiaoke ,  GE, Jian

IPC分类号： G02B27/36 ,  G02B27/40 ,  G02B5/02

CPC分类号： G02B17/04

摘要： High-precision monolithic optical assemblies are formed using low-cost standard optical components, such as wedge plates and/or wedge second surface mirrors. By rolling and/or shifting the components relative to each other with matched optical surfaces in contact, a precise alignment solution is found for a particular optical assembly. The resulting arrangement of components can be bonded or held together so as to form a high-precision monolithic optical assembly, which can be inserted into an optical system, according to the assembly's function. The functionality of the monolithic optical assembly can be independent of the optical system in which it is used.

摘要翻译： 使用诸如楔形板和/或楔形第二表面镜的低成本标准光学部件形成高精度单片光学组件。 通过以相互接触的匹配光学表面相对于彼此滚动和/或移动部件，针对特定的光学组件找到精确的对准方案。 根据组件的功能，可以将所得到的组件布置结合或保持在一起，以形成可以插入到光学系统中的高精度单片光学组件。 单片光学组件的功能可以独立于使用它的光学系统。

公开(公告)号：WO2013019776A2

公开(公告)日：2013-02-07

申请号：PCT/US2012048940

申请日：2012-07-31

申请人： UNIV FLORIDA ,  WAN XIAOKE ,  GE JIAN

发明人： WAN XIAOKE ,  GE JIAN

IPC分类号： G01B11/02

CPC分类号： G01B11/06 ,  G01B9/02021 ,  G01B9/02022 ,  G01B9/02027 ,  G01B9/0207 ,  G01B9/0209 ,  G01B11/0675 ,  G01N21/45

摘要： A scanning monochromatic spatial low-coherent interferometer (S-LCI) can be used to simultaneously measure geometric thickness and refractive index. The probe beam of the scanning S-LCI can be an off-axis converging single wavelength laser beam, and the decomposed incident angles of the beam on the sample can be accurately defined in the Fourier domain. The angle dependent phase shift of a plane parallel plate or other sample can be obtained in a single system measurement. From the angle dependent phase shift, the geometric thickness and refractive index of the sample can be simultaneously obtained. Additionally or alternatively, the S-LCI system can interrogate the sample to profile the location and refractive index of one or more layers within the sample using the disclosed techniques.

摘要翻译： 扫描单色空间低相干干涉仪（S-LCI）可用于同时测量几何厚度和折射率。 扫描S-LCI的探测光束可以是离轴会聚的单波长激光束，并且可以在傅里叶域中精确地定义样品上的光束的分解入射角。 平面平行板或其他样品的角度相关相移可以在单个系统测量中获得。 从角度相关相移可以同时获得样品的几何厚度和折射率。 附加地或替代地，S-LCI系统可以使用所公开的技术来询问样品以分析样品内的一个或多个层的位置和折射率。