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    GRANULES OF A BRITTLE MATERIAL FOR VACUUM GRANULE INJECTION AT ROOM TEMPERATURE, AND METHOD FOR FORMING A COATING FILM USING SAME
    1.
    发明申请
    GRANULES OF A BRITTLE MATERIAL FOR VACUUM GRANULE INJECTION AT ROOM TEMPERATURE, AND METHOD FOR FORMING A COATING FILM USING SAME 审中-公开
    用于真空玻璃注射在室温下的粗材料的颗粒和使用其形成涂膜的方法

    公开(公告)号：WO2012099350A4

    公开(公告)日：2013-01-24

    申请号：PCT/KR2012000086

    申请日：2012-01-04

    Applicant: KOREA MACH & MATERIALS INST ,  PARK DONG SOO ,  KIM JONG-WOO ,  RYU JUNG HO ,  YOON WOON-HA ,  CHOI JONG JIN ,  HAHN BYUNG-DONG

    Inventor： PARK DONG SOO ,  KIM JONG-WOO ,  RYU JUNG HO ,  YOON WOON-HA ,  CHOI JONG JIN ,  HAHN BYUNG-DONG

    IPC: B01J2/00 ,  B01J2/02 ,  B05B7/14 ,  C01B25/32 ,  C23C24/04

    CPC classification number: C23C24/04 ,  C04B35/01 ,  C04B35/016 ,  C04B35/26 ,  C04B35/447 ,  C04B35/46 ,  C04B35/486 ,  C04B35/491 ,  C04B35/50 ,  C04B35/515 ,  C04B35/547 ,  C04B35/62695 ,  C04B2235/528 ,  C04B2235/5436 ,  C04B2235/5445 ,  C04B2235/5481

    Abstract: The present invention relates to granules of a brittle material for vacuum granule injection at room temperature, and to a method for forming a coating film using same. Particularly, particulates having a size of 0.1 to 6 µm are granulated and a coating film may be formed through vacuum granule injection at room temperature using the granules. The granules of the brittle material according to exemplary embodiments may be used through the vacuum granule injection at room temperature and a coating process may be continuously performed. Since the granules injected through a nozzle have a relatively large mass and thus have a large amount of kinetic energy, the coating film may be formed at a low gas-flow rate, and the forming rate of the coating film may be increased. Therefore, the granules may be useful for forming a ceramic coating film. In addition, a coating film having a porosity of 10% or less and having a uniform and fine structure that does have non-uniformities such as cracks, large pores, or a lamellar structure may be formed using the method for forming the coating film according to the exemplary embodiments.

    Abstract translation: 本发明涉及在室温下用于真空颗粒注入的脆性材料的颗粒和使用其形成涂膜的方法。 特别地，将粒径为0.1〜6μm的颗粒造粒，并且可以使用颗粒在室温下通过真空颗粒注射形成涂膜。 根据示例性实施方案的脆性材料的颗粒可以在室温下通过真空颗粒注射使用，并且可以连续进行涂布过程。 由于通过喷嘴喷射的颗粒具有相对较大的质量，因此具有大量的动能，所以可以以低气体流速形成涂膜，并且可以增加涂膜的形成速率。 因此，颗粒可用于形成陶瓷涂膜。 此外，可以使用形成涂膜的方法形成具有10％以下的孔隙率且具有均匀且细微结构的涂膜，其具有不均匀性，例如裂纹，大孔或层状结构， 到示例性实施例。

    GRANULES OF A BRITTLE MATERIAL FOR VACUUM GRANULE INJECTION AT ROOM TEMPERATURE, AND METHOD FOR FORMING A COATING FILM USING SAME
    2.
    发明申请
    GRANULES OF A BRITTLE MATERIAL FOR VACUUM GRANULE INJECTION AT ROOM TEMPERATURE, AND METHOD FOR FORMING A COATING FILM USING SAME 审中-公开
    用于真空玻璃注射在室温下的粗材料的颗粒和使用其形成涂膜的方法

    公开(公告)号：WO2012099350A3

    公开(公告)日：2012-12-06

    申请号：PCT/KR2012000086

    申请日：2012-01-04

    Applicant: KOREA MACH & MATERIALS INST ,  PARK DONG SOO ,  KIM JONG-WOO ,  RYU JUNG HO ,  YOON WOON-HA ,  CHOI JONG JIN ,  HAHN BYUNG-DONG

    Inventor： PARK DONG SOO ,  KIM JONG-WOO ,  RYU JUNG HO ,  YOON WOON-HA ,  CHOI JONG JIN ,  HAHN BYUNG-DONG

    IPC: B01J2/00 ,  B01J2/02 ,  B05B7/14 ,  C01B25/32 ,  C23C24/04

    CPC classification number: C23C24/04 ,  C04B35/01 ,  C04B35/016 ,  C04B35/26 ,  C04B35/447 ,  C04B35/46 ,  C04B35/486 ,  C04B35/491 ,  C04B35/50 ,  C04B35/515 ,  C04B35/547 ,  C04B35/62695 ,  C04B2235/528 ,  C04B2235/5436 ,  C04B2235/5445 ,  C04B2235/5481

    Abstract: The present invention relates to granules of a brittle material for vacuum granule injection at room temperature, and to a method for forming a coating film using same. Particularly, particulates having a size of 0.1 to 6 µm are granulated and a coating film may be formed through vacuum granule injection at room temperature using the granules. The granules of the brittle material according to exemplary embodiments may be used through the vacuum granule injection at room temperature and a coating process may be continuously performed. Since the granules injected through a nozzle have a relatively large mass and thus have a large amount of kinetic energy, the coating film may be formed at a low gas-flow rate, and the forming rate of the coating film may be increased. Therefore, the granules may be useful for forming a ceramic coating film. In addition, a coating film having a porosity of 10% or less and having a uniform and fine structure that does have non-uniformities such as cracks, large pores, or a lamellar structure may be formed using the method for forming the coating film according to the exemplary embodiments.

    Abstract translation: 本发明涉及在室温下用于真空颗粒注入的脆性材料的颗粒和使用其形成涂膜的方法。 特别地，将粒径为0.1〜6μm的颗粒造粒，并且可以使用颗粒在室温下通过真空颗粒注射形成涂膜。 根据示例性实施方案的脆性材料的颗粒可以在室温下通过真空颗粒注射使用，并且可以连续进行涂布过程。 由于通过喷嘴喷射的颗粒具有相对较大的质量，因此具有大量的动能，所以可以以低气体流速形成涂膜，并且可以增加涂膜的形成速率。 因此，颗粒可用于形成陶瓷涂膜。 此外，可以使用形成涂膜的方法形成具有10％以下的孔隙率且具有均匀且细微结构的涂膜，其具有不均匀性，例如裂纹，大孔或层状结构， 到示例性实施例。

    BIO ACTIVE CERAMIC COATINGS WITH EXCELLENT BIO-COMPATIBILITY AND PREAPARATION METHOD THEREOF
    3.
    发明申请
    BIO ACTIVE CERAMIC COATINGS WITH EXCELLENT BIO-COMPATIBILITY AND PREAPARATION METHOD THEREOF 审中-公开
    具有优异生物相容性的生物活性陶瓷涂料及其预处理方法

    公开(公告)号：WO2008038897A1

    公开(公告)日：2008-04-03

    申请号：PCT/KR2007/003469

    申请日：2007-07-18

    Applicant: KOREA INSTITUTE OF MACHINERY AND MATERIALS ,  PARK, Dong-Soo ,  HAHN, Byung-Dong

    Inventor： PARK, Dong-Soo ,  HAHN, Byung-Dong

    IPC: A61F2/28

    CPC classification number: C23C26/00 ,  A61F2/30767 ,  A61F2/3094 ,  A61F2/32 ,  A61F2310/00011 ,  A61F2310/00017 ,  A61F2310/00023 ,  A61F2310/00203 ,  A61F2310/00239 ,  A61F2310/00796 ,  A61L27/306 ,  C23C24/08 ,  C23C30/00

    Abstract: Disclosed herein are a bioactive ceramic coating having excellent biocompatibility and a preparation method thereof. The bioactive ceramic coating is coated onto a metallic material or a ceramic material, including alumina or zirconia, consists of crystalline grains, having an average diameter of less than 0.1 μm, and non-crystalline grains, and has a density of greater than 95% and a thickness ranging from 0.1 to 100 μm. Since the bioactive ceramic coating is present at a mixed state of crystalline grains, having an average diameter of less than 100 nm, and non-crystalline grains, has a crack-free and dense structure, and has excellent biocompatibility, it is useful in bone reconstruction, for example, as a surgical implant or an artificial hip joint.

    Abstract translation: 本文公开了具有优异生物相容性的生物活性陶瓷涂层及其制备方法。 将生物活性陶瓷涂层涂覆在金属材料或包括氧化铝或氧化锆的陶瓷材料上，由平均直径小于0.1μm的晶粒和非晶粒组成，密度大于95％ 厚度为0.1〜100μm。 由于生物活性陶瓷涂层以平均直径小于100nm的晶粒和非晶粒的混合状态存在，具有无裂纹且致密的结构，并且具有优异的生物相容性，因此在骨中有用 重建，例如，作为手术植入物或人造髋关节。

    DENSE RARE EARTH METAL OXIDE COATING FILM FOR SEALING POROUS CERAMIC SURFACE, AND PREPARATION METHOD THEREOF
    5.
    发明申请
    DENSE RARE EARTH METAL OXIDE COATING FILM FOR SEALING POROUS CERAMIC SURFACE, AND PREPARATION METHOD THEREOF 审中-公开
    用于密封多孔陶瓷表面的稀土金属氧化物涂层膜及其制备方法

    公开(公告)号：WO2012033326A3

    公开(公告)日：2012-05-03

    申请号：PCT/KR2011006586

    申请日：2011-09-06

    Applicant: KOREA MACH & MATERIALS INST ,  PARK DONG-SOO ,  LEE BYOUNG-KUK ,  HAHN BYUNG-DONG ,  LEE JUNG-HWAN ,  BYON EUNGSUN

    Inventor： PARK DONG-SOO ,  LEE BYOUNG-KUK ,  HAHN BYUNG-DONG ,  LEE JUNG-HWAN ,  BYON EUNGSUN

    IPC: C23C24/04 ,  B24C1/00 ,  C23C4/12 ,  H01L21/20

    CPC classification number: C23C4/02 ,  C23C4/11 ,  C23C4/134 ,  C23C4/18 ,  C23C24/04

    Abstract: The present invention relates to a dense rare earth metal oxide coating film for sealing a porous ceramic surface, and a preparation method thereof. Particularly, the present invention relates to a rare earth metal oxide coating film formed on a porous ceramic film of a substrate, wherein the porous ceramic film has an average surface roughness of 0.4 to 2.3 m. The dense rare earth metal oxide coating film for sealing a porous ceramic surface, and the preparation method thereof, according to the present invention, can provide not only the effect of ensuring withstand voltage characteristics due to the porous ceramic coating film having a sufficient thickness but also the effect of ensuring plasma resistivity due to the dense rare earth metal oxide coating film, and can therefore be applied to various parts of a semiconductor apparatus including a semiconductor etching apparatus.

    Abstract translation: 本发明涉及一种用于密封多孔陶瓷表面的致密稀土金属氧化物涂膜及其制备方法。 特别地，本发明涉及形成在基板的多孔陶瓷膜上的稀土金属氧化物涂膜，其中多孔陶瓷膜的平均表面粗糙度为0.4〜2.3μm。 根据本发明的用于密封多孔陶瓷表面的致密稀土金属氧化物涂膜及其制备方法不仅可以提供确保由于具有足够厚度的多孔陶瓷涂膜而导致的耐电压特性的效果， 也是由于致密的稀土金属氧化物涂膜而确保等离子体电阻率的效果，因此可以应用于包括半导体蚀刻装置的半导体装置的各个部分。

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