公开(公告)号：WO2008016832A1

公开(公告)日：2008-02-07

申请号：PCT/US2007/074506

申请日：2007-07-26

Applicant: ELECTRO SCIENTIFIC INDUSTRIES, INC. ,  HOLMGREN, Douglas, Earl ,  LO, Ho, Wai ,  CONKLIN, Philip, Mitchell

Inventor： HOLMGREN, Douglas, Earl ,  LO, Ho, Wai ,  CONKLIN, Philip, Mitchell

IPC: G02B26/08

CPC classification number: B23K26/067 ,  B23K26/04 ,  B23K26/043 ,  B23K26/0608 ,  B23K2201/40

Abstract: A method of and system for forming two laser processing beams with controlled stability at a target specimen work surface includes first and second mutually coherent laser beams (130, 140) propagating along separate first and second beam paths that are combined (170) to perform an optical property adjustment. The combined laser beams are separated (190) into third and fourth laser beams (192, 194) propagating along separate beam paths and including respective third and fourth main beam components (192l), and one of the third and fourth laser beams contributes a leakage component that copropagates in mutual temporal coherence with the main beam component (192m) of the other of the third and fourth laser beams. An effect of mutual temporal coherence of the leakage component and the other main beam component with which the leakage component copropagates is reduced through acousto-optic modulation (150, 160) frequency shifts or through incorporation of an optical path length difference (404, 504) in the two beams.

Abstract translation: 用于在目标样品工作表面处形成具有受控稳定性的两个激光加工光束的方法和系统包括沿着分离的第一和第二光束路径传播的第一和第二相互相干的激光束（130,140），所述第一和第二光束路径被组合（170） 光学性能调整。 组合的激光束被分离（190）到沿着分离的光束路径传播并且包括相应的第三和第四主光束分量（192l）的第三和第四激光束（192,194），并且第三和第四激光束中的一个激励有助于泄漏 与第三和第四激光束中的另一个的主光束分量（192m）相互时间相干地共同传播的部件。 通过声光调制（150,160）频移或通过并入光程长度差（404,504）来减少泄漏分量和泄漏分量共同传播的其它主波束分量的相互时间相干性的影响， 在两个梁。