摘要:
Provided is a method for manufacturing a back contact solar cell. More particularly, the method includes: (a) forming via holes to penetrate two facing surfaces of a p-type semiconductor substrate by using laser; (b) performing heat treatment on the semiconductor substrate in the presence of n-type impurity, to thereby dope the n-type impurity in the semiconductor substrate; (c) forming an anti-reflective film on one surface of the two surfaces of the semiconductor substrate, and forming a passivation film on an opposite surface to one surface of the semiconductor substrate; (d) applying a first electrode material that penetrates the passivation film at the time of heat treatment, to thereby form first electrodes on opening parts of the via holes which are on the side of the opposite surface and a portion of the passivation film which is adjacent to the opening parts of the via holes, so as to cover the opening parts of the via holes, and applying a second electrode material that does not penetrate the passivation film at the time of heat treatment, to thereby form second electrodes to cover the first electrodes; (e) applying a third electrode material that penetrates the passivation film at the time of heat treatment, to thereby form third electrodes on the passivation film, and applying a fourth electrode material that does not penetrate the passivation film at the time of heat treatment, to thereby form fourth electrodes to cover the third electrodes; and (f) performing heat treatment on the semiconductor substrate having the first, second, third, and fourth electrodes to thereby allow only the first and third electrodes among the first, second, third, and fourth electrodes to be selectively connected with the semiconductor substrate through a punch-through phenomenon.
摘要:
Provided is a solar cell, including: a semiconductor substrate having a p-n junction; an antireflection film formed on at least one side of the semiconductor substrate; first electrodes formed on the antireflection film; and second electrodes covering the first electrodes, wherein only the first electrodes selectively penetrate the antireflection film and is thus connected with the semiconductor substrate by a punch through process.
摘要:
Provided is a method of fabricating a selective EWT solar cell, including: a) forming via holes penetrating through opposing first and second surfaces of a p-type semiconductor substrate using laser; b) forming an anti-reflective film on the first surface of the semiconductor substrate, and forming a passivation film on the second surface of the semiconductor substrate; c) partially etching the passivation film so as to expose a part of the second surface on which an opening part of each of the via holes is formed; and d) heat-treating the semiconductor substrate under the presence of n-type impurity to dope the n-type impurity on the semiconductor substrate.
摘要:
Provided is a method of manufacturing a solar cell, wherein a solar cell is manufactured by combining a damage removal etching process, a texturing process and an edge isolation process. The method is advantageous in that RIE and DRE are conducted, and then DRE/PSG and/or an edge isolation removal process are simultaneously conducted, so that the movement of a substrate (that is, a wafer) is minimized, thereby reducing the damage rate of the substrate.
摘要:
Provided are a solar cell and a method for manufacturing the same, and more particularly, a solar cell for forming a selective emitter structure and a surface texture using dry plasma etching at the same time, and a method for manufacturing the same. The solar cell includes a silicon semiconductor substrate; an emitter doping layer having a surface, which is textured by a texturing process on an upper portion of the silicon semiconductor substrate and selectively doped; an anti-reflective film layer formed on a front of the substrate; a front electrode accessing to the emitter doping layer by penetrating the anti-reflective film layer; and a rear electrode accessing to a rear of the silicon semiconductor substrate.
摘要:
Provided is a method of manufacturing a solar cell, wherein a solar cell is manufactured by combining a damage removal etching process, a texturing process and an edge isolation process. The method is advantageous in that RIE and DRE are conducted, and then DRE/PSG and/or an edge isolation removal process are simultaneously conducted, so that the movement of a substrate (that is, a wafer) is minimized, thereby reducing the damage rate of the substrate.
摘要:
Provided are a solar cell and a method for manufacturing the same, and more particularly, a solar cell for forming a selective emitter structure and a surface texture using dry plasma etching at the same time, and a method for manufacturing the same. The solar cell includes a silicon semiconductor substrate; an emitter doping layer having a surface, which is textured by a texturing process on an upper portion of the silicon semiconductor substrate and selectively doped; an anti-reflective film layer formed on a front of the substrate; a front electrode accessing to the emitter doping layer by penetrating the anti-reflective film layer; and a rear electrode accessing to a rear of the silicon semiconductor substrate.