公开(公告)号：WO2013012210A3

公开(公告)日：2013-03-14

申请号：PCT/KR2012005570

申请日：2012-07-13

Applicant: KOMICO LTD ,  YOON SUNG-HEE ,  JUNG KWON-HO ,  KIM HO-SOOK ,  KIM SE-RYOUNG

Inventor： YOON SUNG-HEE ,  JUNG KWON-HO ,  KIM HO-SOOK ,  KIM SE-RYOUNG

IPC: H01L21/683 ,  C23C16/458 ,  H01L21/205 ,  H01L21/673 ,  H01L31/18

CPC classification number: H01L21/67333 ,  H01L31/1876 ,  Y02E10/50 ,  Y02P70/521

Abstract: According to the present invention, a tray for loading substrates may comprise: a main body; and a guide unit. The main body may have a flat-plate structure having a first surface on which substrates are loaded, and may be made of a carbon-carbon composite material. The guide unit may guide the substrates onto the main body such that the substrates can each be loaded into predetermined locations. When thin films are formed on substrates for solar cells, the tray for loading the substrates may not only stably maintain physical properties even in a high-temperature process under a plasma atmosphere but also may be implemented into a large area capable of loading a much greater number of substrates.

Abstract translation: 根据本发明，用于装载基板的托盘可以包括：主体; 和导向单元。 主体可以具有平板结构，该平板结构具有第一表面，在其上装载基板，并且可以由碳 - 碳复合材料制成。 引导单元可以将基板引导到主体上，使得每个基板可以被装载到预定位置。 当在用于太阳能电池的基板上形成薄膜时，用于装载基板的托盘不仅可以在等离子体气氛下的高温工艺中稳定地保持物理性能，而且还可以实现在能够加载大得多的大面积 基板数量