公开(公告)号：WO2008040656A3

公开(公告)日：2008-07-31

申请号：PCT/EP2007060118

申请日：2007-09-24

Applicant: SIEMENS AG ,  FREUDENBERG OLIVER ,  KUEHNE INGO ,  REBHAN MATTHIAS

Inventor： FREUDENBERG OLIVER ,  KUEHNE INGO ,  REBHAN MATTHIAS

IPC: G01L9/00

CPC classification number: G01L9/06 ,  G01L1/2293 ,  G01L9/0054 ,  G01L9/0055

Abstract: The present invention relates to an electronic component, in particular a microelectromechanical system pressure sensor (7) or generally MEMS sensors which can be used for high pressures and high temperatures and extreme ambient conditions. The invention is distinguished by the fact that a particularly temperature-resistant semiconductor compound, to be precise silicon carbide (SiC), is used as the substrate. In this way, it is possible to detect high pressures and temperatures, in particular in turbines and compressors (10). In addition, an ultrasonic measured value transducer (9) is proposed for data transmission purposes.

Abstract translation: 本发明涉及用于高压和高温以及极端环境条件的电子部件，特别是微电子机械系统压力传感器（7）或者通常MEMS传感器。 本发明的特征在于使用特别耐温的半导体化合物，特别是碳化硅（SiC）作为衬底。 以这种方式，可以检测到高压和高温，特别是在涡轮机和压缩机（10）中。 另外，提出了用于数据传输的超声波换能器（9）。