公开(公告)号：WO2015081330A3

公开(公告)日：2015-08-20

申请号：PCT/US2014067832

申请日：2014-11-29

申请人： BOTICKI JOHN ,  BOURNOVILLE JIM ,  LARSON PAUL

发明人： BOTICKI JOHN ,  BOURNOVILLE JIM ,  LARSON PAUL

IPC分类号： B01F5/04

CPC分类号： B01F15/00422 ,  B01F3/0865 ,  B01F5/043 ,  B01F15/026 ,  B01F15/0429 ,  D06F39/02 ,  F16K31/404

摘要： A liquid dispenser for dispensing an effluent mixture comprises a manifold inlet connectable to a pressurized liquid source, at least one individual diluent outlet in fluid communication with the manifold inlet, and at least one backflow preventer and eductor system in fluid communication with the at least one individual diluent outlet. A flow regulator is in fluid communication with the at least one individual diluent outlet and the at least one backflow preventer and eductor system, located upstream of the at least one backflow preventer and eductor system and downstream of the at least one individual diluent outlet. The flow regulator is preferably individualized for the at least one backflow preventer and eductor system and interchangeable within the dispenser to facilitate a plurality of volumetric flow rates to the at least one respective backflow preventer and eductor system.

摘要翻译： 用于分配流出物混合物的液体分配器包括可连接至加压液体源的歧管入口，与歧管入口流体连通的至少一个单独稀释剂出口，以及与至少一个流体连通的至少一个回流防止器和喷射器系统 个别稀释剂出口。 流量调节器与位于至少一个回流防止器和喷射器系统上游和至少一个单独稀释剂出口下游的至少一个单独稀释剂出口和至少一个回流防止器和喷射器系统流体连通。 流量调节器优选地针对至少一个回流防止器和喷射器系统是个性化的并且可在分配器内互换，以促进到至少一个相应的回流防止器和喷射器系统的多个体积流量。

公开(公告)号：WO2015066264A3

公开(公告)日：2015-07-30

申请号：PCT/US2014063041

申请日：2014-10-30

申请人： BOTICKI JOHN ,  BOURNOVILLE JIM ,  LARSON PAUL ,  HORVATH DAVE

发明人： BOTICKI JOHN ,  BOURNOVILLE JIM ,  LARSON PAUL ,  HORVATH DAVE

IPC分类号： B01F5/04

CPC分类号： B01F3/0865 ,  B01F5/0421 ,  B01F5/043 ,  Y10T137/0447 ,  Y10T137/87587

摘要： A high-flow liquid dispenser comprises a diluent inlet connectable to a pressurized liquid source and a backflow preventer and eductor system in fluid commimication with the diluent inlet and defining a dispenser outlet for dispensing the effluent mixture, The backflow preventer and eductor system comprises at least two air gap or safe gap eductors in simultaneous fluid communication with the diluent inlet.

摘要翻译： 高流量液体分配器包括可连接到加压液体源的稀释剂入口以及与稀释剂入口流体通过并限定用于分配流出物混合物的分配器出口的防逆流器和喷射器系统。防逆流器和喷射器系统至少包括 两个气隙或安全间隙喷射器与稀释剂入口同时流体连通。

公开(公告)号：WO2004061388A2

公开(公告)日：2004-07-22

申请号：PCT/US2003/041372

申请日：2003-12-23

申请人： PHYSICAL ELECTRONICS, INC. ,  LARSON, Paul, E. ,  WATSON, David, G. ,  MOULDER, John, F.

发明人： LARSON, Paul, E. ,  WATSON, David, G. ,  MOULDER, John, F.

IPC分类号： G01B11/06

CPC分类号： G01B11/06 ,  G01B15/02 ,  G01N23/227

摘要： The present invention provides for characterization of a film (e.g., thickness determination for a silicon oxynitride film) using a comparison process (e.g., a fitting process) to compare measured peak shapes for elemental and/or chemical species (e.g., Si peak shapes previously measured for a particular process to be monitored) to collected spectral data (e.g., using a non-linear least squares fitting algorithm). Further, the present invention provides for characterization of a film (e.g., thickness determination for a silicon oxynitride film) using collected spectral data. For example, an acquired spectrum may be cumulatively integrated and the geometric properties of the integrated spectrum may be used to determine component concentration information. Thickness measurements for the film may be provided based on the component concentration information.

摘要翻译： 本发明提供了使用比较过程（例如，拟合过程）来比较元素和/或化学物质的测量峰形状（例如，先前的Si峰形状）的膜的表征（例如，氮氧化硅膜的厚度测定） 测量要监视的特定过程）到收集的光谱数据（例如，使用非线性最小二乘拟合算法）。 此外，本发明提供使用收集的光谱数据表征膜（例如，氮氧化硅膜的厚度测定）。 例如，可以累积地收集获取的光谱，并且可以使用积分光谱的几何特性来确定分量浓度信息。 可以基于组分浓度信息提供膜的厚度测量。

公开(公告)号：WO2015081330A2

公开(公告)日：2015-06-04

申请号：PCT/US2014/067832

申请日：2014-11-29

申请人： BOTICKI, John ,  BOURNOVILLE, Jim ,  LARSON, Paul

发明人： BOTICKI, John ,  BOURNOVILLE, Jim ,  LARSON, Paul

IPC分类号： F16K21/16

CPC分类号： B01F15/00422 ,  B01F3/0865 ,  B01F5/043 ,  B01F15/026 ,  B01F15/0429 ,  D06F39/02 ,  F16K31/404

摘要： A liquid dispenser for dispensing an effluent mixture comprises a manifold inlet connectable to a pressurized liquid source, at least one individual diluent outlet in fluid communication with the manifold inlet, and at least one backflow preventer and eductor system in fluid communication with the at least one individual diluent outlet. A flow regulator is in fluid communication with the at least one individual diluent outlet and the at least one backflow preventer and eductor system, located upstream of the at least one backflow preventer and eductor system and downstream of the at least one individual diluent outlet. The flow regulator is preferably individualized for the at least one backflow preventer and eductor system and interchangeable within the dispenser to facilitate a plurality of volumetric flow rates to the at least one respective backflow preventer and eductor system.

摘要翻译： 用于分配流出物混合物的液体分配器包括可连接到加压液体源的歧管入口，与歧管入口流体连通的至少一个单独的稀释剂出口，以及与至少一个流体连通的至少一个回流防止器和喷射器系统 个别稀释剂出口。 流量调节器与至少一个单独的稀释剂出口和至少一个回流防止器和喷射器系统流体连通，位于至少一个防逆流器和喷射器系统的上游，并且位于至少一个单独的稀释剂出口的下游。 流量调节器优选地个体化用于至少一个回流防止器和喷射器系统，并且在分配器内可互换，以便于至少一个相应的防逆流器和喷射器系统的多个体积流速。

公开(公告)号：WO2013148181A3

公开(公告)日：2014-05-08

申请号：PCT/US2013030751

申请日：2013-03-13

申请人： ULVAC PHI INC ,  LARSON PAUL E ,  HAMMOND JOHN S ,  FISHER GREGORY L ,  HEEREN RON M

发明人： LARSON PAUL E ,  HAMMOND JOHN S ,  FISHER GREGORY L ,  HEEREN RON M

IPC分类号： H01J49/00 ,  H01J49/06

CPC分类号： H01J49/004 ,  H01J49/0027 ,  H01J49/0045 ,  H01J49/009 ,  H01J49/061

摘要： A system and method for acquisition of mass spectrometry data is configured to provide a stream of charged particles (e.g., from an analytical volume). A primary mass spectrometer (e.g., time-of-flight mass spectrometer) may be used to separate charged particles of the stream of charged particles based on their mass-to-charge ratio and detect the charged particles in a mass-to-charge spectrum. A stream of precursor ions having a selected mass range may be diverted from the stream of charged particles for fragmentation to provide fragment ions (e.g., fragment ions from the analytical volume). The fragment ions may be provided to a second mass spectrometer for analysis of the fragment ions (e.g., during the same time as the time- of-flight mass spectrometer is separating and detecting charged particles of the stream of charged particles based on their mass-to-charge ratio).

摘要翻译： 用于获取质谱数据的系统和方法被配置为提供带电粒子流（例如，来自分析体积）。 可以使用初级质谱仪（例如，飞行时间质谱仪）来基于其质荷比来分离带电粒子流的带电粒子，并以质量与电荷光谱检测带电粒子 。 具有选定质量范围的前体离子流可以从带电粒子流转移以进行碎裂以提供碎片离子（例如来自分析体积的碎片离子）。 碎片离子可以提供给第二质谱仪用于分析碎片离子（例如，在与飞行时间质谱仪分离并同时检测带电粒子流的带电粒子的同时，基于它们的质量 - 充电比）。

公开(公告)号：WO2013192440A3

公开(公告)日：2014-03-20

申请号：PCT/US2013046870

申请日：2013-06-20

申请人： BOTICKI JOHN ,  BOURNOVILLE JIM ,  LARSON PAUL

发明人： BOTICKI JOHN ,  BOURNOVILLE JIM ,  LARSON PAUL

IPC分类号： F16K31/08

CPC分类号： F16K31/082 ,  F16K31/084 ,  F16K31/365 ,  F16K31/404 ,  F16K31/46

摘要： Thrs invention relates generally to the dispensing of a fluid. More specifically, the invention relates to an apparatus and method for remotely controlling the flow of an effluent fluid stream from a dispensing hose of a fluid dispenser. An actuator controls at least one valve assembly of the fluid dispenser and comprises a generator located remotely of the at least one valve assembly, for generating a low-pressure signal, and at least one receiver in fluid communication with the generator for receiving the low pressure signal of each receiver operabiy associated with each valve assembly. The actuator also facilitates the simultaneous, sequential and alternate control of the at least one valve assembly.

摘要翻译： 本发明一般涉及流体的分配。 更具体地说，本发明涉及用于远程控制来自流体分配器的分配软管的流出物流的流动的装置和方法。 致动器控制流体分配器的至少一个阀组件，并且包括位于至少一个阀组件的远端的用于产生低压信号的发生器，以及与发生器流体连通的至少一个接收器，用于接收低压 每个接收器的信号与每个阀组件相关联。 致动器还促进了对至少一个阀组件的同时，顺序和交替的控制。

公开(公告)号：WO2011127031A3

公开(公告)日：2012-01-05

申请号：PCT/US2011031212

申请日：2011-04-05

申请人： DIVERSEY INC ,  SCHILLER STEVEN E ,  LARSON PAUL ,  BOURNOVILLE JAMES L

发明人： SCHILLER STEVEN E ,  LARSON PAUL ,  BOURNOVILLE JAMES L

IPC分类号： F16K15/02 ,  F16K11/00 ,  F16K31/122 ,  F16K31/66

CPC分类号： B01F3/0865 ,  B01F5/0428 ,  B01F15/00149 ,  B01F15/00162 ,  B05B7/0408 ,  B05B9/03 ,  B05B12/087 ,  B08B3/026 ,  B08B2203/0217 ,  B08B2203/0282

摘要： A dispensing assembly for dispensing a mixture of fluids is provided. In some embodiments, the dispensing assembly includes a first valve for selectively permitting fluid flow to a mixing chamber in which a second fluid is introduced, wherein the valve is actuated between open and closed positions responsive to fluid pressure downstream of the mixing chamber. In such embodiments, the fluid pressure downstream of the mixing chamber can change based upon whether fluid is dispensed from a spray gun, wand, nozzle, or other dispensing head of the dispensing assembly.

摘要翻译： 提供了用于分配流体混合物的分配组件。 在一些实施例中，分配组件包括第一阀门，用于选择性地允许流体流到引入第二流体的混合腔室，其中响应于混合腔室下游的流体压力，阀门在打开位置和闭合位置之间被致动。 在这样的实施例中，混合室下游的流体压力可以基于流体是否从喷枪，棒，喷嘴或分配组件的其他分配头分配而改变。

公开(公告)号：WO2011127031A2

公开(公告)日：2011-10-13

申请号：PCT/US2011/031212

申请日：2011-04-05

申请人： DIVERSEY, INC. ,  SCHILLER, Steven, E. ,  LARSON, Paul ,  BOURNOVILLE, James, L.

发明人： SCHILLER, Steven, E. ,  LARSON, Paul ,  BOURNOVILLE, James, L.

IPC分类号： F16K15/02 ,  F16K11/00 ,  F16K31/122 ,  F16K31/66

CPC分类号： B01F3/0865 ,  B01F5/0428 ,  B01F15/00149 ,  B01F15/00162 ,  B05B7/0408 ,  B05B9/03 ,  B05B12/087 ,  B08B3/026 ,  B08B2203/0217 ,  B08B2203/0282

摘要： A dispensing assembly for dispensing a mixture of fluids is provided. In some embodiments, the dispensing assembly includes a first valve for selectively permitting fluid flow to a mixing chamber in which a second fluid is introduced, wherein the valve is actuated between open and closed positions responsive to fluid pressure downstream of the mixing chamber. In such embodiments, the fluid pressure downstream of the mixing chamber can change based upon whether fluid is dispensed from a spray gun, wand, nozzle, or other dispensing head of the dispensing assembly.

摘要翻译： 提供了用于分配流体混合物的分配组件。 在一些实施例中，分配组件包括用于选择性地允许流体流入混合室的第一阀，其中引入第二流体，其中响应于混合室下游的流体压力，阀在打开和关闭位置之间被致动。 在这种实施例中，混合室下游的流体压力可以基于流体是否从分配组件的喷枪，棒，喷嘴或其他分配头部分配而改变。

公开(公告)号：WO2010107861A1

公开(公告)日：2010-09-23

申请号：PCT/US2010/027580

申请日：2010-03-17

申请人： PHYSICAL ELECTRONICS USA, INC. ,  WATSON, David, G. ,  LARSON, Paul, E. ,  PAUL, Dennis, F. ,  NEGRI, Ronald, E.

发明人： WATSON, David, G. ,  LARSON, Paul, E. ,  PAUL, Dennis, F. ,  NEGRI, Ronald, E.

IPC分类号： H01J49/48

CPC分类号： H01J49/482

摘要： A sample holder apparatus and method for reducing the energy of charged particles entering an annular-acceptance analyzer includes use of an electrically isolated sample support member having a sample receiving surface configured to receive a sample and electrically connect the sample to the sample support member (e.g., wherein the sample support member is configured for application of a retarding bias potential). A grounded sample aperture member defining an aperture relative to the sample support member but electrically isolated therefrom is provided such that the aperture is proximate the sample receiving surface to expose at least a portion of a surface of a sample received thereon to be analyzed (e.g., wherein applying a retarding bias potential to the sample support member produces an electrical retarding field about the aperture that reduces the energy of emitted particles from a sample before they enter an annular-acceptance analyzer).

摘要翻译： 用于减少进入环形验收分析仪的带电粒子的能量的样品保持器装置和方法包括使用电隔离的样品支撑构件，其具有构造成接收样品并将样品电连接到样品支撑构件的样品接收表面（例如， ，其中所述样品支撑构件被配置为施加延迟偏置电位）。 提供了限定相对于样品支撑构件但与其电隔离的孔的接地的样品孔径构件，使得孔径接近样品接收表面以暴露待分析的样品的至少一部分表面（例如， 其中向所述样品支撑构件施加阻滞偏置电位产生围绕所述孔的电延迟场，所述电延迟场在它们进入环形接受分析器之前降低来自样品的发射颗粒的能量）。

公开(公告)号：WO2003038417A3

公开(公告)日：2003-05-08

申请号：PCT/US2002/034137

申请日：2002-10-24

申请人： PHYSICAL ELECTRONICS, INC. ,  WATSON, David, G. ,  LARSON, Paul, E. ,  MOULDER, John, E. ,  PERLOFF, David, S.

发明人： WATSON, David, G. ,  LARSON, Paul, E. ,  MOULDER, John, E. ,  PERLOFF, David, S.

IPC分类号： G01N23/22

摘要： Characterization of a sample, e.g., a depth profile, may be attained using one or more of the following parameters in an electron spectroscopy method or system. The one or more parameters may include using low ion energy ions for removing material from the sample to expose progressively deeper layers of the sample, using an ion beam having a low ion angle to perform such removal of sample material, and/or using an analyzer positioned at a high analyzer angle for receiving photoelectrons escaping from the sample as a result of x-rays irradiating the sample. Further, a correction algorithm may be used to determine the concentration of components (e.g., elements and/or chemical species) versus depth within the sample, e.g., thin film formed on a substrate. Such concentration determination may include calculating the concentration of components (e.g, elements and/or chemical species) at each depth of a depth profile by removing from depth profile data collected at a particular depth (i.e., the depth for which concentration is to be calculated) concentration contributions attributable to deeper depths of the sample. In addition, characterization of a sample, e.g., determination of a component's concentration in a thin film, may be attained by providing calibration information representative of surface spectrum measurements for a plurality of samples correlated with depth profile information for the plurality of samples. At least one characteristic of the sample to be characterized (e.g., concentration of a component) is determined based on one or more surface spectrum measurements for the sample to be characterized and the calibration information.