公开(公告)号：WO2011126528A1

公开(公告)日：2011-10-13

申请号：PCT/US2010/061666

申请日：2010-12-21

Applicant: CALIFORNIA INSTITUTE OF TECHNOLOGY ,  ATWATER, Harry, A. ,  LEITE, Marina, S. ,  WARMANN, Emily, C. ,  CALLAHAN, Dennis

Inventor： ATWATER, Harry, A. ,  LEITE, Marina, S. ,  WARMANN, Emily, C. ,  CALLAHAN, Dennis

IPC: H01L21/20

CPC classification number: H01L21/2007 ,  C30B29/40 ,  C30B29/48 ,  C30B33/00 ,  H01L21/02392 ,  H01L21/02546

Abstract: A virtual substrate includes a handle support and a strain-relieved single crystalline layer on the handle support. A method of making the virtual substrate includes growing a coherently-strained single crystalline layer on an initial growth substrate, removing the initial growth substrate to relieve the strain on the single crystalline layer, and applying the strain- relieved single crystalline layer on a handle support.

Abstract translation: 虚拟衬底包括手柄支撑件和手柄支撑件上的应变消除的单晶层。 制造虚拟衬底的方法包括在初始生长衬底上生长相干应变单晶层，去除初始生长衬底以减轻单晶层上的应变，并将应变消除的单晶层施加在手柄支撑件上 。