公开(公告)号：WO2006023523A2

公开(公告)日：2006-03-02

申请号：PCT/US2005029201

申请日：2005-08-16

Applicant: LAU KAM C ,  LIU YUANQUN

Inventor： LAU KAM C ,  LIU YUANQUN

IPC: G01B9/02

CPC classification number: G01B9/02068 ,  G01B2290/70

Abstract: An optical measurement system combines an optical interferometer (406) with an optical autocollimator (408) to increase the number of translational and yaw and pitch measurements of a reflective target (410) made with a laser (400) emitting a single laser beam (403). Translational measurements are made with a fringe counter (426) in the interferometer (406). Yaw and pitch measurements are made with a lateral effect photodiode detector (434) in the autocollimator (408). The effects of angular deviations in the returned target beam (409) may be minimized with a reverse telescopic lens assembly (428), allowing a wider range of angular measurements without significant degradation of translational measurement accuracy.

Abstract translation: 光学测量系统将光学干涉仪（406）与光学自动准直仪（408）组合以增加用发射单个激光束（403）的激光器（400）制成的反射目标（410）的平移和偏航以及俯仰测量的数量 ）。 利用干涉仪（406）中的条纹计数器（426）进行平移测量。 利用自动准直仪（408）中的横向效应光电二极管检测器（434）进行偏航和倾斜测量。 利用反向伸缩透镜组件（428），可以使返回的目标光束（409）中的角度偏差的影响最小化，允许更宽范围的角度测量而不会显着降低平移测量精度。

公开(公告)号：WO2006023523A3

公开(公告)日：2006-03-02

申请号：PCT/US2005/029201

申请日：2005-08-16

Applicant: LAU, Kam, C. ,  LIU, Yuanqun

Inventor： LAU, Kam, C. ,  LIU, Yuanqun

IPC: G01B9/02

Abstract: An optical measurement system combines an optical interferometer (406) with an optical autocollimator (408) to increase the number of translational and yaw and pitch measurements of a reflective target (410) made with a laser (400) emitting a single laser beam (403). Translational measurements are made with a fringe counter (426) in the interferometer (406). Yaw and pitch measurements are made with a lateral effect photodiode detector (434) in the autocollimator (408). The effects of angular deviations in the returned target beam (409) may be minimized with a reverse telescopic lens assembly (428), allowing a wider range of angular measurements without significant degradation of translational measurement accuracy.