CORROSION PROTECTION AND LUBRICATION OF MEMS DEVICES
    1.
    发明申请
    CORROSION PROTECTION AND LUBRICATION OF MEMS DEVICES 审中-公开
    MEMS器件的腐蚀保护和润滑

    公开(公告)号:WO2010132424A2

    公开(公告)日:2010-11-18

    申请号:PCT/US2010034354

    申请日:2010-05-11

    CPC classification number: G02B26/0841 B81B3/0075 B81B2201/047

    Abstract: Systems and methods, such as for a MEMS device, can include a component having a contact portion that includes on one side a layer including hydrophilic functional groups and a coating formed on the layer. The coating can include hydrophilic functional groups adapted to interact with the hydrophilic functional groups of the layer. The coating can also include hydrophobic functional groups opposite the hydrophilic functional groups of the coating. The layer can be bonded to the component, and the coating can be bonded to the layer. The coating can be adapted to be formed on the layer while in vapor form and can include a lubricant. The layer can be an atomic monolayer or multilayer, such as of aluminum oxide, and the coating can include a fluorinated acid, such as perfluorodecanoic acid.

    Abstract translation: 诸如用于MEMS器件的系统和方法可以包括具有接触部分的部件,该部分在一侧包括包含亲水性官能团的层和形成在该层上的涂层。 涂层可以包括适于与层的亲水性官能团相互作用的亲水性官能团。 涂层还可以包括与涂层的亲水性官能团相对的疏水官能团。 该层可以结合到组分上,并且涂层可以结合到该层。 涂层可以适于在蒸气形式的层上形成并且可以包括润滑剂。 该层可以是原子单层或多层,例如氧化铝,并且涂层可以包括氟化酸,例如全氟癸酸。

    CORROSION PROTECTION AND LUBRICATION OF MEMS DEVICES

    公开(公告)号:WO2010132424A3

    公开(公告)日:2010-11-18

    申请号:PCT/US2010/034354

    申请日:2010-05-11

    Abstract: Systems and methods, such as for a MEMS device, can include a component having a contact portion that includes on one side a layer including hydrophilic functional groups and a coating formed on the layer. The coating can include hydrophilic functional groups adapted to interact with the hydrophilic functional groups of the layer. The coating can also include hydrophobic functional groups opposite the hydrophilic functional groups of the coating. The layer can be bonded to the component, and the coating can be bonded to the layer. The coating can be adapted to be formed on the layer while in vapor form and can include a lubricant. The layer can be an atomic monolayer or multilayer, such as of aluminum oxide, and the coating can include a fluorinated acid, such as perfluorodecanoic acid.

Patent Agency Ranking