公开(公告)号：WO2009154965A3

公开(公告)日：2010-02-25

申请号：PCT/US2009045239

申请日：2009-05-27

Applicant: RES FOUNDATION OF THE STATE UN ,  RUAN JUNRU

Inventor： RUAN JUNRU

IPC: H01L21/027 ,  H01L21/68

CPC classification number: G03B27/68 ,  B82Y10/00 ,  B82Y40/00 ,  G01B11/06 ,  G01B11/26 ,  G03F9/7026 ,  G03F9/7088 ,  H01J37/3174

Abstract: Method and apparatus are provided for automated determination and adjustment of height and tilt of a substrate surface within a lithography system. The method includes: directing a beam of light onto the substrate surface, which reflects off the substrate surface as a reflected beam; optically splitting the reflected beam into a first reflected beam portion and a second reflected beam portion; impinging the first reflected beam portion onto a first detector plane of a first optical detector to generate intensity data, and impinging the second reflected beam portion onto a second detector plane of a second optical detector to generate intensity data, and utilizing the generated data in determining height and tilt of the substrate surface relative to a nominal writing plane of the lithography system. Responsive to the determination, focus or tilt of the system's writing beam, or position of the substrate surface within the system, is adjusted.

Abstract translation: 提供了用于自动确定和调整光刻系统内的基板表面的高度和倾斜的方法和装置。 该方法包括：将光束引导到衬底表面上，反射离开衬底表面作为反射光束; 将反射光束光学分解成第一反射光束部分和第二反射光束部分; 将第一反射光束部分入射到第一光学检测器的第一检测器平面上以产生强度数据，并将第二反射光束部分入射到第二光学检测器的第二检测器平面上以产生强度数据，并且利用所生成的数据来确定 基板表面相对于光刻系统的标称写入平面的高度和倾斜度。 调整系统书写光束的确定，聚焦或倾斜或基板表面在系统内的位置。

公开(公告)号：WO2009146082A3

公开(公告)日：2010-01-21

申请号：PCT/US2009039179

申请日：2009-04-01

Applicant: RES FOUNDATION OF THE STATE UN ,  SHARONY JACOB ,  SHARMA SATYA ,  EYNAV SHMUEL ,  STANACEVIC MILUTIN ,  ATHALYE AKSHAY

Inventor： SHARONY JACOB ,  SHARMA SATYA ,  EYNAV SHMUEL ,  STANACEVIC MILUTIN ,  ATHALYE AKSHAY

IPC: G06Q50/00

CPC classification number: G06F19/3418 ,  A61B5/4833 ,  G06F19/3462 ,  G06Q50/22

Abstract: Disclosed is an apparatus and system for monitoring drug regimen compliance, the system utilizing a Radio Frequency Identification (RfID) tag affixed to a pharmaceutical agent and a wearable RFID reader that identifies a patient. The RFID tag identifies the pharmaceutical agent and the RFID reader wirelessly communicates with a central monitoring system upon ingestion of the pharmaceutical agent.

Abstract translation: 公开了一种用于监测药物方案依从性的装置和系统，该系统利用固定在药剂上的射频识别（RFID）标签和识别患者的可穿戴RFID读取器。 RFID标签识别药剂，并且RFID读取器在摄取药剂时与中央监测系统无线通信。

公开(公告)号：WO2009102984A3

公开(公告)日：2009-12-03

申请号：PCT/US2009034104

申请日：2009-02-13

Applicant: RES FOUNDATION OF THE STATE UN ,  KAUFMAN ARIE ,  MARINO JOSEPH

Inventor： KAUFMAN ARIE ,  MARINO JOSEPH

IPC: A61B1/00 ,  A61B1/06 ,  A61B5/055 ,  A61B6/00

CPC classification number: A61B1/00009 ,  A61B1/0005 ,  A61B5/055 ,  A61B6/032

Abstract: Virtually augmented endoscopy includes overlaying optical endoscopy image data with a virtual endoscopy model. Image distortion in the optical endoscopy image data can be substantially reduced. Features in the virtual endoscopy model can be correlated with features in the optical endoscopy image data to improve examination performance. A correlation path through the virtual endoscopy model can be determined that reasonably follows the physical path of an endoscope. A 2D or 3D correlation model can be generated from the image data and correlated to the virtual endoscopy model. Correlation between the scan data domain and the image data domain can use either the correlation path, correlation model or a combination thereof. CAD tools and other features of virtual endoscopy can then be applied to enhance the performance of optical endoscopy.

Abstract translation: 几乎增强的内窥镜检查包括将光学内窥镜图像数据与虚拟内窥镜模型重叠。 光学内窥镜图像数据中的图像失真可以显着降低。 虚拟内窥镜模型中的特征可以与光学内窥镜图像数据中的特征相关联以提高检查性能。 可以确定通过虚拟内窥镜模型的相关路径，其合理地遵循内窥镜的物理路径。 2D或3D相关模型可以从图像数据生成并与虚拟内窥镜模型相关联。 扫描数据域和图像数据域之间的相关性可以使用相关性路径，相关性模型或其组合。 然后可以应用CAD工具和虚拟内窥镜的其他特征来提高光学内窥镜的性能。