REUSABLE CRUCIBLES AND METHOD OF MANUFACTURING THEM
    1.
    发明申请
    REUSABLE CRUCIBLES AND METHOD OF MANUFACTURING THEM 审中-公开
    可重复使用的硬质合金及其制造方法

    公开(公告)号:WO2007148986A1

    公开(公告)日:2007-12-27

    申请号:PCT/NO2007/000220

    申请日:2007-06-20

    Abstract: This invention relates to reusable crucibles for production of ingots of semiconductor grade silicon made of nitride bonded silicon nitride (NBSN). The crucibles may be made by mixing silicon nitride powder with silicon powder, forming a green body of the crucible, and then heating the green body in an atmosphere containing nitrogen such that the silicon powder is nitrided forming the NBSN-crucible. The crucibles may be assembled by plate elements of NBSN-material that are to be the bottom (1) and walls (3, 5) of a square cross-section crucible, and optionally sealing the joints by applying a paste comprising silicon powder and optionally silicon nitride particles, followed by a second heat treatment in a nitrogen atmosphere.

    Abstract translation: 本发明涉及用于生产由氮化物接合氮化硅(NBSN)制成的半导体级硅的锭的可重复使用的坩埚。 坩埚可以通过将氮化硅粉末与硅粉末混合,形成坩埚的生坯体,然后在含有氮气的气氛中加热生坯体,使得硅粉末氮化形成NBSN坩埚而制成。 坩埚可以由正方形横截面坩埚的底部(1)和壁(3,5)的NBSN材料的板元件组装,并且可选地通过施加包含硅粉末和任选的 氮化硅颗粒,然后在氮气气氛中进行第二次热处理。

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