公开(公告)号：WO2005116525A3

公开(公告)日：2007-03-01

申请号：PCT/US2005017085

申请日：2005-05-17

Applicant: MATHESON TRI GAS INC ,  DEL PRATO THOMAS A ,  SPICER HAROLD G

Inventor： DEL PRATO THOMAS A ,  SPICER HAROLD G

IPC: C01C1/12 ,  B01D53/79 ,  C01C1/02 ,  C01C1/08 ,  F23J11/00

CPC classification number: C01C1/086 ,  B01D53/79 ,  C01C1/024 ,  C01P2006/80

Abstract: A system and method for generating, purifying, and using ultra-pure ammonia on-site, such as at a semiconductor manufacturing facility. The system includes an ammonia generation system configured to generate ammonia including carbon dioxide, water, and other impurities. A purification system is provided with the generation system in the manufacturing facility and is linked to the output of the generation system. The purification system processes the effluent from the ammonia generation system to remove substantially all of the carbon dioxide, water, and other impurities to produce an outlet stream of ultra-pure ammonia. The system further includes a point of use system provided at the same manufacturing facility to utilize the outlet stream of ultra-pure ammonia.

Abstract translation: 用于在现场生成，净化和使用超纯氨的系统和方法，例如在半导体制造设备中。 该系统包括氨生成系统，其被配置为产生包括二氧化碳，水和其它杂质的氨。 净化系统在制造设施中具有发电系统，并与发电系统的输出相连接。 净化系统处理来自氨生成系统的流出物，以基本上除去二氧化碳，水和其它杂质，以产生超纯氨的出口流。 该系统还包括设置在同一制造设施处以利用超纯氨出口流的使用点系统。

公开(公告)号：WO2005116525A2

公开(公告)日：2005-12-08

申请号：PCT/US2005/017085

申请日：2005-05-17

Applicant: MATHESON TRI-GAS, INC. ,  DEL PRATO, Thomas, A. ,  SPICER, Harold, G.

Inventor： DEL PRATO, Thomas, A. ,  SPICER, Harold, G.

IPC: F23J11/00

CPC classification number: C01C1/086 ,  B01D53/79 ,  C01C1/024 ,  C01P2006/80

Abstract: A system and method for generating, purifying, and using ultra-pure ammonia on-site, such as at a semiconductor manufacturing facility. The system includes an ammonia generation system configured to generate ammonia including carbon dioxide, water, and other impurities. A purification system is provided with the generation system in the manufacturing facility and is linked to the output of the generation system. The purification system processes the effluent from the ammonia generation system to remove substantially all of the carbon dioxide, water, and other impurities to produce an outlet stream of ultra-pure ammonia. The system further includes a point of use system provided at the same manufacturing facility to utilize the outlet stream of ultra-pure ammonia.

Abstract translation: 用于在现场生成，净化和使用超纯氨的系统和方法，例如在半导体制造设备中。 该系统包括氨生成系统，其被配置为产生包括二氧化碳，水和其它杂质的氨。 净化系统在制造设施中具有发电系统，并与发电系统的输出相连接。 净化系统处理来自氨生成系统的流出物，以基本上除去二氧化碳，水和其它杂质，以产生超纯氨的出口流。 该系统还包括设置在同一制造设施处以利用超纯氨出口流的使用点系统。