公开(公告)号：WO2011123500A2

公开(公告)日：2011-10-06

申请号：PCT/US2011/030453

申请日：2011-03-30

Applicant: APPLIED MATERIALS, INC. ,  TERTITSKI, Leonid, M. ,  KUTTANNAIR, Krishna, Kumar ,  HUNTER, Aaron ,  MOFFATT, Stephen

Inventor： TERTITSKI, Leonid, M. ,  KUTTANNAIR, Krishna, Kumar ,  HUNTER, Aaron ,  MOFFATT, Stephen

IPC: H01L21/324

CPC classification number: B23K26/0066 ,  B23K26/0006 ,  B23K26/0823 ,  B23K26/0876 ,  B23K26/12 ,  B23K26/127 ,  B23K2201/40 ,  B23K2203/52 ,  B23K2203/56 ,  Y10T29/41

Abstract: A method and apparatus for targeting a beam of radiation is provided. A beam steering mirror and a beam capture mirror are movably disposed along an optical pathway. A controller moves the beam steering mirror and the beam capture mirror in an x-y plane, and rotates the mirrors, to target the beam to a target location on a surface, while keeping the optical path length substantially constant for all target locations on the surface. The surface is rotated by a rotational actuator to bring all target locations to positions accessible by the beam targeting optics. Imprecision in targeting and optical path length may be compensated by providing an actuated aperture at the beam entry point and/or a variable focus lens with an optical range finding detector, all in communication with the controller.

Abstract translation: 提供了一种用于瞄准辐射束的方法和装置。 光束导向镜和光束捕获镜沿着光学路径可移动地设置。 控制器将光束导向反射镜和光束捕获镜移动到x-y平面中，并且使反射镜旋转以将光束瞄准到表面上的目标位置，同时保持光学表面上的所有目标位置的光程长度基本恒定。 该表面由旋转致动器旋转以将所有目标位置移动到由光束瞄准光学器件接近的位置。 可以通过在光束入口点处提供致动孔径和/或具有光学测距探测器的可变焦距透镜来全部与控制器通信来补偿瞄准和光路长度的不精确性。

公开(公告)号：WO2012091910A2

公开(公告)日：2012-07-05

申请号：PCT/US2011064462

申请日：2011-12-12

Applicant: APPLIED MATERIALS INC ,  SEREBRYANOV OLEG V ,  GOLDIN ALEXANDER ,  MAYUR ABHILASH J ,  TERTITSKI LEONID M

Inventor： SEREBRYANOV OLEG V ,  GOLDIN ALEXANDER ,  MAYUR ABHILASH J ,  TERTITSKI LEONID M

IPC: H01S3/10 ,  H01S3/13 ,  H01S5/06

CPC classification number: H01S3/0014 ,  B23K26/0081 ,  B23K26/0626 ,  H01S3/10038

Abstract: Embodiments of the invention provide systems, devices, and methods for controlling a laser. The system includes a controller to control a laser a ramp generator to ramp down power to the laser, the ramp generator electrically coupled with the controller and coupleable with the laser, and a hardware protection system electrically coupled with the ramp generator, wherein the ramp generator monitors signals sent from the controller and the hardware protection system to the ramp generator to detect signal failure and ramps down the power to the laser upon signal failure detection. The method includes sending a control status signal from a controller for a laser to a ramp generator, monitoring the control status signal for missing pulses, sending a hardware interlock status signal from a hardware protection system to the ramp generator, monitoring the hardware interlock status signal for signal failure, and ramping down power to the laser upon detection of missing pulses or signal failure.

Abstract translation: 本发明的实施例提供了用于控制激光器的系统，装置和方法。 该系统包括控制器，用于控制激光器斜坡发生器以降低对激光器的功率，斜坡发生器与控制器电耦合并与激光器耦合，以及与斜坡发生器电耦合的硬件保护系统，其中斜坡发生器 监控从控制器和硬件保护系统发送到斜坡发生器的信号，以在信号故障检测时检测信号故障并降低激光器的功率。 该方法包括将控制状态信号从用于激光的控制器发送到斜坡发生器，监视用于丢失脉冲的控制状态信号，从硬件保护系统向斜坡发生器发送硬件互锁状态信号，监视硬件互锁状态信号 用于信号故障，并且在检测到丢失的脉冲或信号故障时向激光器提供功率。

公开(公告)号：WO2012091910A3

公开(公告)日：2012-07-05

申请号：PCT/US2011/064462

申请日：2011-12-12

Applicant: APPLIED MATERIALS, INC. ,  SEREBRYANOV, Oleg V. ,  GOLDIN, Alexander ,  MAYUR, Abhilash J. ,  TERTITSKI, Leonid M.

Inventor： SEREBRYANOV, Oleg V. ,  GOLDIN, Alexander ,  MAYUR, Abhilash J. ,  TERTITSKI, Leonid M.

IPC: H01S3/10 ,  H01S3/13 ,  H01S5/06

Abstract: Embodiments of the invention provide systems, devices, and methods for controlling a laser. The system includes a controller to control a laser a ramp generator to ramp down power to the laser, the ramp generator electrically coupled with the controller and coupleable with the laser, and a hardware protection system electrically coupled with the ramp generator, wherein the ramp generator monitors signals sent from the controller and the hardware protection system to the ramp generator to detect signal failure and ramps down the power to the laser upon signal failure detection. The method includes sending a control status signal from a controller for a laser to a ramp generator, monitoring the control status signal for missing pulses, sending a hardware interlock status signal from a hardware protection system to the ramp generator, monitoring the hardware interlock status signal for signal failure, and ramping down power to the laser upon detection of missing pulses or signal failure.

公开(公告)号：WO2011123500A3

公开(公告)日：2012-01-12

申请号：PCT/US2011030453

申请日：2011-03-30

Applicant: APPLIED MATERIALS INC ,  TERTITSKI LEONID M ,  KUTTANNAIR KRISHNA KUMAR ,  HUNTER AARON ,  MOFFATT STEPHEN

Inventor： TERTITSKI LEONID M ,  KUTTANNAIR KRISHNA KUMAR ,  HUNTER AARON ,  MOFFATT STEPHEN

IPC: H01L21/324

CPC classification number: B23K26/0066 ,  B23K26/0006 ,  B23K26/0823 ,  B23K26/0876 ,  B23K26/12 ,  B23K26/127 ,  B23K2201/40 ,  B23K2203/52 ,  B23K2203/56 ,  Y10T29/41

Abstract: A method and apparatus for targeting a beam of radiation is provided. A beam steering mirror and a beam capture mirror are movably disposed along an optical pathway. A controller moves the beam steering mirror and the beam capture mirror in an x-y plane, and rotates the mirrors, to target the beam to a target location on a surface, while keeping the optical path length substantially constant for all target locations on the surface. The surface is rotated by a rotational actuator to bring all target locations to positions accessible by the beam targeting optics. Imprecision in targeting and optical path length may be compensated by providing an actuated aperture at the beam entry point and/or a variable focus lens with an optical range finding detector, all in communication with the controller.

Abstract translation: 提供了一种用于瞄准辐射束的方法和装置。 光束导向镜和光束捕获镜沿着光学路径可移动地设置。 控制器将光束导向反射镜和光束捕获镜移动到x-y平面中，并且使反射镜旋转以将光束瞄准到表面上的目标位置，同时保持光学表面上的所有目标位置的光程长度基本恒定。 该表面由旋转致动器旋转以将所有目标位置移动到由光束瞄准光学器件接近的位置。 可以通过在光束入口点处提供致动孔径和/或具有光学测距探测器的可变焦距透镜来全部与控制器通信来补偿瞄准和光路长度的不精确性。