公开(公告)号：WO2007010570A1

公开(公告)日：2007-01-25

申请号：PCT/IT2005/000431

申请日：2005-07-22

Applicant: STMICROELECTRONICS S.R.L. ,  RICOTTI, Giulio ,  MORELLI, Marco ,  DELLA TORRE, Luigi ,  VITALI, Andrea, Lorenzo ,  MASTROMATTEO, Ubaldo

Inventor： RICOTTI, Giulio ,  MORELLI, Marco ,  DELLA TORRE, Luigi ,  VITALI, Andrea, Lorenzo ,  MASTROMATTEO, Ubaldo

IPC: G01L9/06 ,  G01L19/06

CPC classification number: G01L9/0054 ,  G01L9/0045 ,  G01L15/00

Abstract: In a pressure sensor (15) with double measuring scale: a monolithic body (16) of semiconductor material has a first main surface (16a), a bulk region (17) and a sensitive portion (33) upon which pressure (P) acts; a cavity (18) is formed in the monolithic body (16) and is separated from the first main surface (16a) by a membrane (19), which is flexible and deformable as a function of the pressure (P), and is arranged inside the sensitive portion (33) and is surrounded by the bulk region (17); a low-pressure detecting element (28) of the piezoresistive type, sensitive to first values of pressure (P), is integrated in the membrane (19) and has a variable resistance as a function of the deformation of the membrane (19); in addition, a high-pressure detecting element (29), also of a piezoresistive type, is formed in the bulk region (17) inside the sensitive portion (33) and has a variable resistance as a function of the pressure (P). The high­pressure detecting element (29) is sensitive to second values of pressure (P).

Abstract translation: 在具有双重测量标尺的压力传感器（15）中：半导体材料的整体（16）具有第一主表面（16a），主体区域（17）和压力（P）作用于其上的敏感部分 ; 在整体式主体（16）中形成空腔（18），并且通过膜（19）与第一主表面（16a）分离，该膜（19）作为压力（P）的函数是柔性和可变形的，并且布置 在所述敏感部分（33）的内部并且被所述主体区域（17）包围; 对第一压力值（P）敏感的压阻型低压检测元件（28）集成在膜（19）中，并具有作为膜（19）的变形的函数的可变电阻; 此外，在敏感部分（33）内的主体区域（17）中形成压阻型高压检测元件（29），并具有作为压力（P）的函数的可变电阻。 高压检测元件（29）对第二压力值（P）敏感。

公开(公告)号：WO2007032032A8

公开(公告)日：2007-10-04

申请号：PCT/IT2005000529

申请日：2005-09-16

Applicant: ST MICROELECTRONICS SRL ,  MURARI BRUNO ,  RICOTTI GIULIO ,  DELLA TORRE LUIGI ,  VITALI ANDREA LORENZO

Inventor： MURARI BRUNO ,  RICOTTI GIULIO ,  DELLA TORRE LUIGI ,  VITALI ANDREA LORENZO

IPC: G01L1/02 ,  G01L9/00

CPC classification number: G01L9/0054 ,  G01L1/02 ,  G01L5/225 ,  G01L9/0045 ,  G01L9/0089 ,  G01L19/0645 ,  G01L19/146

Abstract: In a pressure sensor (35), a pressure-sensor element (10) has a monolithic body (12) of semiconductor material, and a first main face (12a) and a second main face (12b) acting on which is a stress resulting from a pressure (P) the value of which is to be determined; and a package (36) encloses the pressure-sensor element (10). The package (36) has an inner chamber (37) containing liquid material (38), and the pressure-sensor element (10) is arranged within the inner chamber (37) in such a manner that the first and second main faces (12a, 12b) are both in contact with the liquid material (38). In particular, the liquid material is a silicone gel.

Abstract translation: 在压力传感器（35）中，压力传感器元件（10）具有半导体材料的整体（12），并且作用于其上的应力产生的第一主面（12a）和第二主面（12b） 从压力（P）来确定其值; 并且包装（36）包围压力传感器元件（10）。 包装（36）具有容纳液体材料（38）的内室（37），并且压力传感器元件（10）以这样的方式设置在内室（37）内，使得第一和第二主面 ，12b）均与液体材料（38）接触。 特别地，液体材料是硅胶。

公开(公告)号：WO2007032032A1

公开(公告)日：2007-03-22

申请号：PCT/IT2005/000529

申请日：2005-09-16

Applicant: STMICROELECTRONICS S.R.L. ,  MURARI, Bruno ,  RICOTTI, Giulio ,  DELLA TORRE, Luigi ,  VITALI, Andrea, Lorenzo

Inventor： MURARI, Bruno ,  RICOTTI, Giulio ,  DELLA TORRE, Luigi ,  VITALI, Andrea, Lorenzo

IPC: G01L1/02 ,  G01L9/00

CPC classification number: G01L9/0054 ,  G01L1/02 ,  G01L5/225 ,  G01L9/0045 ,  G01L9/0089 ,  G01L19/0645 ,  G01L19/146

Abstract: In a pressure sensor (35) , a pressure-sensor element (10) has a monolithic body (12) of semiconductor material, and a first main face (12a) and a second main face (12b) acting on which is a stress resulting from a pressure (P) the value of which is to be determined; and a package (36) encloses the pressure­sensor element (10) . The package (36) has an inner chamber (37) containing liquid material (38), and the -ores sure-sensor element (10) is arranged within the inner chamber (37) in such a manner that the first and second main faces (12a, 12b) are both in contact with the liquid material (38). In particular, the liquid material is a silicone gel.

Abstract translation: 在压力传感器（35）中，压力传感器元件（10）具有半导体材料的整体（12），并且作用于其上的应力产生的第一主面（12a）和第二主面（12b） 从压力（P）来确定其值; 并且包装（36）包围所述压力传感器元件（10）。 包装（36）具有容纳液体材料（38）的内部室（37），并且 - 确定传感器元件（10）以这样的方式设置在内部室（37）内，使得第一和第二主要面 （12a，12b）都与液体材料（38）接触。 特别地，液体材料是硅胶。

公开(公告)号：WO2007010574A1

公开(公告)日：2007-01-25

申请号：PCT/IT2005/000435

申请日：2005-07-22

Applicant: STMICROELECTRONICS S.R.L. ,  RICOTTI, Giulio ,  MORELLI, Marco ,  DELLA TORRE, Luigi ,  VITALI, Andrea, Lorenzo

Inventor： RICOTTI, Giulio ,  MORELLI, Marco ,  DELLA TORRE, Luigi ,  VITALI, Andrea, Lorenzo

IPC: G01L1/18 ,  G01L9/00 ,  G01L9/06

CPC classification number: G01L1/18 ,  B60T2270/82

Abstract: In an integrated pressure sensor (15) with a high full-scale value, a monolithic body (16) of semiconductor material has a first and a second main surface (16a and 16b), opposite and separated by a substantially uniform distance (w). The monolithic body (16) has a bulk region (17), having a sensitive portion (23) next to the first main surface (16a), upon which pressure (P) acts. A first piezoresistive detection element (18) is integrated in the sensitive portion (23) and has a variable resistance as a function of the pressure (P). The bulk region (17) is a solid and compact region and has a thickness substantially equal to the distance (w).

Abstract translation: 在具有高满量程值的集成压力传感器（15）中，半导体材料的整体（16）具有第一和第二主表面（16a和16b），所述第一和第二主表面相对并分开大致均匀的距离（w） 。 整体式主体（16）具有主体区域（17），其具有靠近第一主表面（16a）的敏感部分（23），压力（P）作用在该区域上。 第一压阻检测元件（18）集成在敏感部分（23）中并且具有作为压力（P）的函数的可变电阻。 本体区域（17）是实心且紧凑的区域，其厚度基本上等于距离（w）。