METHODS FOR ETCHING A MATERIAL LAYER FOR SEMICONDUCTOR APPLICATIONS

    公开(公告)号:WO2021127862A1

    公开(公告)日:2021-07-01

    申请号:PCT/CN2019/127495

    申请日:2019-12-23

    Abstract: An apparatus and method for etching a material layer with a cyclic etching and deposition process. The method for etching a material layer on a substrate includes: (a) etching at least a portion of a material layer (302) on a substrate (101) in an etch chamber (100) to form an open feature (360) having a bottom surface (312) and sidewalls in the material layer (302); (b) forming a protection layer (314) on the sidewalls and the bottom surface (312) of the open feature (360) from a protection layer (314) gas mixture comprising at least one carbon-fluorine containing gas; (c) selectively removing the protection layer (314) formed on the bottom surface (312 )of the open feature (360) from a bottom surface (312) open gas mixture comprising the carbon-fluorine containing gas; and (d) continuingly etching the material layer (302) from the bottom surface (312) of the open feature (360) until a desired depth of the open feature (360) is reached.

    TIME-AWARE OCCUPANCY GRID MAPPING FOR ROBOTS IN DYNAMIC ENVIRONMENTS

    公开(公告)号:WO2020118545A1

    公开(公告)日:2020-06-18

    申请号:PCT/CN2018/120493

    申请日:2018-12-12

    Abstract: A time-aware occupancy mapping using regression to unknown ( "RTU" ) analysis, and an apparatus to dynamically allocate occupancy probability to a cell in an environment to thereby form a time-aware occupancy map of the environment are disclosed. The apparatus includes a memory circuitry in communication with a processor circuitry, the memory circuitry configured to receive and store probability information from the processor circuitry and to store the probability value and its corresponding time stamp at a probability table. The processor circuitry may be configured to, among others: (1) receive occupancy information, the occupancy information defining whether a first of a plurality of cells (102,104, 106 and 108) in the environment is occupied; (2) determine a first probability value that the first cell is occupied at a first point in time; (3) direct the first probability value and its corresponding timestamp to the memory circuitry to store; (4) determine a second probability value that the first cell is occupied at a second point in time, the second point in time defined by a lapsed interval from the first point in time to the second point in time; and (5) update the memory circuitry to store the second probability value and its corresponding timestamp.

    HEARING IMPLANT
    3.
    发明申请
    HEARING IMPLANT 审中-公开
    听力植入

    公开(公告)号:WO2006075169A1

    公开(公告)日:2006-07-20

    申请号:PCT/GB2006/000119

    申请日:2006-01-13

    CPC classification number: H04R25/606 A61F2002/183 H04R17/02

    Abstract: The present invention concerns an actuator for an implantable hearing aid for implantation into the human middle ear. The actuator comprises a substantially elongate piezoelectric component (34, 36) having first and second operating end faces (41, 43), said end faces extending substantially at right angles to the longitudinal axis of the piezoelectric component. Also there is provided a frame component comprising at least one flextensional amplifier element (32), the flextensional amplifier element being integral with and connecting first and second frame end portions (42, 44), the first and second frame end portions also extending substantially at right angles to longitudinal axis of the piezoelectric component when fitted thereto, whereby the first and second end portions are in contact with the piezoelectric component end faces.

    Abstract translation: 本发明涉及用于植入人中耳的可植入助听器的致动器。 致动器包括具有第一和第二操作端面(41,43)的基本上细长的压电元件(34,36),所述端面基本上与压电元件的纵向轴线成直角延伸。 还提供了一种包括至少一个张力放大器元件(32)的框架部件,该屈曲放大器元件与第一和第二框架端部(42,44)成一体并且连接第一和第二框架端部(42,44),第一和第二框架端部也基本上延伸 与压电部件的纵轴成直角,由此第一和第二端部与压电元件端面接触。

    CAMERA REGISTRATION VIA ROBOT
    4.
    发明申请

    公开(公告)号:WO2022134060A1

    公开(公告)日:2022-06-30

    申请号:PCT/CN2020/139588

    申请日:2020-12-25

    Abstract: The disclosure provides techniques for registering a camera into a map via a robot. A method for registering a camera into a map may include: collecting an observation of a calibration marker from an image captured by the camera, the calibration maker being attached to a robot capable of moving in a view of the camera; calculating, for the observation of the calibration marker, a transform T (camera, marker) between a camera frame of the camera and a marker frame of the calibration marker; obtaining, for the observation of the calibration marker, a transform T (world, robot) between a world frame of the map and a robot frame of the robot; and performing, when more than a predetermined number of observations of the calibration marker are collected during movement of the robot, a calibration process to calculate a transform T(world, camera) between the world frame and the camera frame based on the transform T (camera, marker) and the transform T(world, robot) for each observation of the calibration marker.

    METHOD OF DEPOSITING A PRE-ETCH PROTECTIVE LAYER

    公开(公告)号:WO2022036549A1

    公开(公告)日:2022-02-24

    申请号:PCT/CN2020/109777

    申请日:2020-08-18

    Abstract: A method of cyclic etching, comprising: (A) depositing, prior to cyclically etching a substrate (100) through a mask (104) opening (108), a pre-etch protection layer (120) conformally over a mask(104), sidewalls(116) of the mask (104) defining the mask opening (108); and an exposed portion of the substrate (100) exposed through the mask opening (108), the pre-etch protection layer (120) deposited to a first thickness; and (B) cyclically etching the substrate (100) by: (i) depositing a protection layer (132) in the opening (108) of the mask (104), the protection layer (132) deposited to a second thickness that is less than half of the first thickness; (ii) etching through a portion of the protection layer (132) disposed on the substrate (100) and etching the substrate (100); and (iii) repeating (i) and (ii) until an end point is reached.

    TRAINING DATA GENERATORS AND METHODS FOR MACHINE LEARNING

    公开(公告)号:WO2019127231A1

    公开(公告)日:2019-07-04

    申请号:PCT/CN2017/119453

    申请日:2017-12-28

    Abstract: Training data generators and methods for machine learning are disclosed. An example method to generate training data for machine learning by generating simulated training data for a target neural network, transforming, with a training data transformer, the simulated training data form transformed training data, the training data transformer trained to increase a conformance of the transformed training data and the simulated training data, and training the target neural network with the transformed training data.

    TECHNOLOGIES FOR LIDAR BASED MOVING OBJECT DETECTION

    公开(公告)号:WO2018119823A1

    公开(公告)日:2018-07-05

    申请号:PCT/CN2016/112890

    申请日:2016-12-29

    Abstract: Technologies for monitoring a movement of one or more objects include an autonomous compute device. The autonomous compute device includes an optical system, for example, a LIDAR system, to capture optical data that may be used to determine a relative position of the one or more objects relative to the autonomous compute device. Based on the optical data captured at one point in time and an indication of how much the autonomous compute device has moved, the autonomous compute device may predict where an object will be relative to the autonomous compute device at a later point in time. Based on optical data captured at the later point in time, the autonomous compute device may determine whether the position of the object has been changed and further analyze the changes to monitor the movement of the object.

    THREE DIMENSIONAL ELECTRONIC PATCH
    8.
    发明申请
    THREE DIMENSIONAL ELECTRONIC PATCH 审中-公开
    三维电子贴

    公开(公告)号:WO2017019210A1

    公开(公告)日:2017-02-02

    申请号:PCT/US2016/038779

    申请日:2016-06-22

    Abstract: A three-dimensional electronic patch includes a flat flexible circuit substrate that includes an elastic layer including a first portion and a second portion. The second portion includes at least side connected to the elastic layer and one or more sides defined by one or more cuts in the elastic layer. The three-dimensional electronic patch further includes a first sensor on the first portion of the elastic layer, a first conductive sensing pad under the first portion of the elastic layer and in electrical connection with the first sensor, and a conductive layer under the second portion of the elastic layer and in electrical connection with the first sensor. The second portion is folded to position the conductive layer away from the first portion.

    Abstract translation: 三维电子贴片包括平坦柔性电路基板,其包括包括第一部分和第二部分的弹性层。 第二部分至少包括连接到弹性层的一侧和由弹性层中的一个或多个切口限定的一个或多个侧面。 三维电子贴片还包括在弹性层的第一部分上的第一传感器,在弹性层的第一部分下方并与第一传感器电连接的第一导电感测垫,以及在第二部分下的导电层 的弹性层并与第一传感器电连接。 第二部分被折叠以将导电层定位成远离第一部分。

    SPIROCYCLIC MOLECULES AS PROTEIN KINASE INHIBITORS
    9.
    发明申请
    SPIROCYCLIC MOLECULES AS PROTEIN KINASE INHIBITORS 审中-公开
    SPIROCYCLIC分子作为蛋白激酶抑制剂

    公开(公告)号:WO2013013308A1

    公开(公告)日:2013-01-31

    申请号:PCT/CA2012/000709

    申请日:2012-07-26

    CPC classification number: A61K31/4439 A61K45/06 C07D401/14 A61K2300/00

    Abstract: The present invention relates to spirocyclic compounds of formula I, namely spirocyclic (1H-pyrazol-4-yl)-3-( 1-(2,6-dichloro-3- fiuorophenyl) ethoxy)pyridin-2-amines having protein kinase inhibitory activity, and methods of synthesizing and using such compounds. Preferred compounds are c-Met and/or ALK inhibitors useful for the treatment of abnormal cell growth, such as cancers.

    Abstract translation: 本发明涉及式I的螺环化合物,即具有蛋白激酶抑制性的螺环(1H-吡唑-4-基)-3-(1-(2,6-二氯-3-氟苯基)乙氧基)吡啶-2-胺 活性,以及​​合成和使用这些化合物的方法。 优选的化合物是用于治疗异常细胞生长的c-Met和/或ALK抑制剂,例如癌症。

    EYE DETECTING METHOD AND EYE DETECTING DEVICE
    10.
    发明申请
    EYE DETECTING METHOD AND EYE DETECTING DEVICE 审中-公开
    眼睛检测方法和眼睛检测装置

    公开(公告)号:WO2012000408A1

    公开(公告)日:2012-01-05

    申请号:PCT/CN2011/076339

    申请日:2011-06-24

    CPC classification number: G06K9/00604

    Abstract: An eye detecting method is provided. The method comprises: detecting whether there is a face region in a N th image (S202); if yes, detecting whether there is a first eye region in the N th image and obtaining a detecting result of the N th image (S204); recording the detecting result of the N th image and receiving a (N+1) th image (S206); if the detecting result of the N th image indicates there is the first eye region in the N th image (S208, yes), determining an area in the (N+1) th image corresponding to and larger than the first eye region as a pending eye region in the (N+1) th image (S210), otherwise (S208, no) making N=N+1 and returning to step S202; and detecting whether there is a second eye region in the pending eye region in the (N+1) th image (S212), making N=N+1 and returning to step S206.

    Abstract translation: 提供一种眼睛检测方法。 该方法包括:检测第N图像中是否存在面部区域(S202); 如果是,则检测第N图像中是否存在第一眼睛区域并获得第N图像的检测结果(S204); 记录第N图像的检测结果并接收第(N + 1)图像(S206); 如果第N图像的检测结果表示第N个图像中存在第一眼睛区域(S208,是),则确定与第一眼睛区域相对应的第(N + 1)个图像中的区域作为 (N + 1)图像(S210)中的等待眼睛区域,否则(S208,否)使N = N + 1并返回到步骤S202; 并且检测第(N + 1)图像中的待定眼睛区域中是否存在第二眼睛区域(S212),使N = N + 1并返回到步骤S206。

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