METHODS OF FABRICATING PHOTOSENSITIVE SUBSTRATES SUITABLE FOR OPTICAL COUPLER
    1.
    发明申请
    METHODS OF FABRICATING PHOTOSENSITIVE SUBSTRATES SUITABLE FOR OPTICAL COUPLER 审中-公开
    制造适用于光学耦合器的光敏基底的方法

    公开(公告)号:WO2017177171A1

    公开(公告)日:2017-10-12

    申请号:PCT/US2017/026662

    申请日:2017-04-07

    摘要: The present invention provides a method to fabricate an optical coupler comprising the steps of: preparing a photosensitive glass substrate comprising at least silica, lithium oxide, aluminum oxide, and cerium oxide; masking a halftone design with variation in optical density to delineate an optical element in the glass; exposing the photosensitive glass substrate to an activating energy source; exposing the photosensitive glass substrate to a heating phase of at least ten minutes above its glass transition temperature; cooling the photosensitive glass substrate to transform at least part of the exposed glass to a crystalline material to form a glass-crystalline substrate; and etching the glass-crystalline substrate with an etchant solution to form the one or more optical elements.

    摘要翻译: 本发明提供了一种制造光耦合器的方法,其包括以下步骤:制备至少包含二氧化硅,氧化锂,氧化铝和氧化铈的光敏玻璃基板; 掩蔽具有光密度变化的半色调设计以描绘玻璃中的光学元件; 将所述光敏玻璃基板暴露于活化能源; 将所述光敏玻璃基板暴露于比其玻璃化转变温度高至少10分钟的加热阶段; 冷却所述光敏玻璃基板以将所述暴露的玻璃的至少一部分转变成晶体材料以形成玻璃晶体基板; 以及用蚀刻剂溶液蚀刻玻璃晶体衬底以形成一个或多个光学元件。